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1. WO2022161606 - METHOD OF RUNNING A LASER SYSTEM, LASER SYSTEM AND EVAPORATION SYSTEM

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Publication Number WO/2022/161606
Publication Date 04.08.2022
International Application No. PCT/EP2021/051882
International Filing Date 27.01.2021
IPC
C23C 14/28 2006.1
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
24Vacuum evaporation
28by wave energy or particle radiation
B23K 26/06 2014.1
BPERFORMING OPERATIONS; TRANSPORTING
23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
26Working by laser beam, e.g. welding, cutting or boring
02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
06Shaping the laser beam, e.g. by masks or multi-focusing
C23C 14/54 2006.1
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
54Controlling or regulating the coating process
B23K 26/067 2006.1
BPERFORMING OPERATIONS; TRANSPORTING
23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
26Working by laser beam, e.g. welding, cutting or boring
02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
06Shaping the laser beam, e.g. by masks or multi-focusing
067Dividing the beam into multiple beams, e.g. multi-focusing
CPC
C23C 14/28
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
24Vacuum evaporation
28by wave energy or particle radiation
C23C 14/542
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
54Controlling or regulating the coating process
542Controlling the film thickness or evaporation rate
Applicants
  • MAX-PLANCK-GESELLSCHAFT ZUR FÖRDERUNG DER WISSENSCHAFTEN E.V. [DE]/[DE]
Inventors
  • BRAUN, Wolfgang
Agents
  • MANITZ FINSTERWALD (MFP)
Priority Data
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) METHOD OF RUNNING A LASER SYSTEM, LASER SYSTEM AND EVAPORATION SYSTEM
(FR) PROCÉDÉ DE FONCTIONNEMENT D'UN SYSTÈME LASER, SYSTÈME LASER ET SYSTÈME D'ÉVAPORATION
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Abstract
(EN) The present invention is related to a method for running a laser system (10) for providing a laser beam (22) for heating a surface (68) of a target (66) located in a reaction chamber (62) of an evaporation system (60), the laser system (10) comprising a laser light source (20) for providing an at least essentially parallel laser beam (22) with an at least essentially centrally peaked intensity profile (24). In addition, the present invention is related to a laser system (10) for heating a surface (68) of a target (66) located in a reaction chamber (62) of an evaporation system (60), the reaction chamber (62) comprising a chamber window (64), and the laser system (10) comprising a laser light source (20) for providing an at least essentially parallel laser beam (22) with an at least essentially centrally peaked intensity profile (24). Further, the present invention is related to an evaporation system (60) the evaporation system (60) comprising a target (66) located in a reaction chamber (62) and at least one laser system (10) for heating a surface (68) of the target (66).
(FR) La présente invention concerne un procédé pour faire fonctionner un système laser (10) pour fournir un faisceau laser (22) pour chauffer une surface (68) d'une cible (66) située dans une chambre de réaction (62) d'un système d'évaporation (60), le système laser (10) comprenant une source de lumière laser (20) pour fournir un faisceau laser (22) au moins sensiblement parallèle ayant un profil d'intensité (24) au moins sensiblement central. De plus, la présente invention concerne un système laser (10) pour chauffer une surface (68) d'une cible (66) située dans une chambre de réaction (62) d'un système d'évaporation (60), la chambre de réaction (62) comprenant une fenêtre de chambre (64), et le système laser (10) comprenant une source de lumière laser (20) pour fournir un faisceau laser (22) au moins sensiblement parallèle ayant un profil d'intensité (24) au moins sensiblement central. En outre, la présente invention concerne un système d'évaporation (60), le système d'évaporation (60) comprenant une cible (66) située dans une chambre de réaction (62) et au moins un système laser (10) pour chauffer une surface (68) de la cible (66).
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