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1. WO2022126198 - METHOD OF PROCESSING INTERFEROMETRY SIGNAL, AND ASSOCIATED INTERFEROMETER

Publication Number WO/2022/126198
Publication Date 23.06.2022
International Application No. PCT/AU2021/051513
International Filing Date 17.12.2021
IPC
G01B 9/02 2022.1
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9Instruments as specified in the subgroups and characterised by the use of optical measuring means
02Interferometers
G01B 9/02061 2022.1
G01B 9/02055 2022.1
G01J 9/02 2006.1
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
9Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
02by interferometric methods
G01J 3/02 2006.1
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
02Details
CPC
G01B 9/02
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9Instruments as specified in the subgroups and characterised by the use of optical measuring means
02Interferometers ; for determining dimensional properties of, or relations between, measurement objects
G01B 9/02055
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9Instruments as specified in the subgroups and characterised by the use of optical measuring means
02Interferometers ; for determining dimensional properties of, or relations between, measurement objects
02055characterised by error reduction techniques
G01B 9/02061
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9Instruments as specified in the subgroups and characterised by the use of optical measuring means
02Interferometers ; for determining dimensional properties of, or relations between, measurement objects
02055characterised by error reduction techniques
02056Passive error reduction, i.e. not varying during measurement, e.g. by constructional details of optics
02061Reducing or preventing effect of tilt or misalignment, e.g. of object or reference mirror
G01J 3/02
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
02Details
G01J 9/02
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
9Measuring optical phase difference
02by interferometric methods
Applicants
  • RAPID PHENOTYPING PTY LIMITED [AU]/[AU]
Inventors
  • RODD-ROUTLEY, Selene
Agents
  • NICHOLAS SALMON
Priority Data
202090472118.12.2020AU
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) METHOD OF PROCESSING INTERFEROMETRY SIGNAL, AND ASSOCIATED INTERFEROMETER
(FR) PROCÉDÉ DE TRAITEMENT DE SIGNAL D'INTERFÉROMÉTRIE ET INTERFÉROMÈTRE ASSOCIÉ
Abstract
(EN) The present invention relates to a method of reducing phase-error signal degradation in a characteristic spectrum produced by a Fourier Transform interferometer, comprising the steps of: (1) Receiving, upon the detector array, a light beam comprised of a plurality of light channels, each of the light channels being received at a corresponding location upon the detector array; (II) Producing, for each corresponding location, a Raw Location-Specific Signal (LSS) from the received light channels; (Ill) for each Raw LSS, calculating an Off-Axis Path Difference (OxPaDE) scaling function dependent upon a distance and direction of the corresponding location from a target location; (IV) coordinate-transforming each Raw LSS using their corresponding calculated OxPaDE function to produce an Adjusted LSS; (V) averaging each Adjusted LSS to produce a Combined Signal; and (VI) inverse Fourier-Transforming the Combined Signal to produce the characteristic spectrum of the received light beam as a function of wavenumber.
(FR) La présente invention concerne un procédé de réduction de la dégradation de signal d'erreur de phase dans un spectre caractéristique produit par un interféromètre à transformée de Fourier consistant : (1) à recevoir, sur le réseau de détecteurs, un faisceau de lumière composé d'une pluralité de canaux de lumière, chacun des canaux de lumière étant reçu à un emplacement correspondant sur le réseau de détecteurs ; (II) à produire, pour chaque emplacement correspondant, un signal spécifique d'emplacement brut (LSS) à partir des canaux de lumière reçus ; (III) pour chaque LSS brut, à calculer une fonction de mise à l'échelle de différence de trajet hors axe (OxPaDE) dépendant d'une distance et d'une direction de l'emplacement correspondant par rapport à un emplacement cible ; (IV) à transformer en coordonnées chaque LSS brut à l'aide de leur fonction OxPaDE calculée correspondante afin de produire un LSS réglé ; (V) à effectuer la moyenne de chaque LSS réglé afin de produire un signal combiné ; et (VI) à effectuer une transformée inverse de Fourier du signal combiné afin de produire le spectre caractéristique du faisceau lumineux reçu en fonction du nombre d'ondes.
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