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1. WO2022118711 - METHOD AND APPARATUS FOR PRODUCING TRANSPARENT GAS BARRIER FILM

Publication Number WO/2022/118711
Publication Date 09.06.2022
International Application No. PCT/JP2021/043002
International Filing Date 24.11.2021
IPC
C23C 14/24 2006.1
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
24Vacuum evaporation
B32B 9/00 2006.1
BPERFORMING OPERATIONS; TRANSPORTING
32LAYERED PRODUCTS
BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
9Layered products essentially comprising a particular substance not covered by groups B32B11/-B32B29/137
C23C 14/08 2006.1
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06characterised by the coating material
08Oxides
CPC
B32B 9/00
BPERFORMING OPERATIONS; TRANSPORTING
32LAYERED PRODUCTS
BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
9Layered products comprising a ; layer of a; particular substance not covered by groups B32B11/00 - B32B29/00
C23C 14/08
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06characterised by the coating material
08Oxides
C23C 14/24
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
24Vacuum evaporation
Applicants
  • 東洋紡株式会社 TOYOBO CO., LTD. [JP]/[JP]
Inventors
  • 伊関 清司 ISEKI, Kiyoshi
Priority Data
2020-20050202.12.2020JP
Publication Language Japanese (ja)
Filing Language Japanese (JA)
Designated States
Title
(EN) METHOD AND APPARATUS FOR PRODUCING TRANSPARENT GAS BARRIER FILM
(FR) PROCÉDÉ ET DISPOSITIF DE FABRICATION DE FILM TRANSPARENT BARRIÈRE AU GAZ
(JA) 透明ガスバリアフィルムの製造方法及び製造装置
Abstract
(EN) A method and apparatus for producing a long transparent barrier film, which has stable barrier properties and color by stably adjusting the degree of oxidation and the film thickness to desired values, comprises a step for producing a transparent gas barrier film which has, on at least one surface of a plastic film, an aluminum oxide layer that is mainly composed of aluminum oxide or a silicon oxide layer that is mainly composed of silicon oxide, said aluminum or silicon oxide layer being produced by evaporating aluminum metal or silicon metal and injecting oxygen thereinto. In this step, the film thickness of the thus-formed aluminum oxide layer or silicon oxide layer is measured by a film thickness gauge using X ray fluorescence and the light transmittance of the thus-formed aluminum oxide layer or silicon oxide layer is measured by a light transmittance measuring device so as to control the film thickness and the light transmittance to be at predetermined values.
(FR) L'invention concerne un procédé et un dispositif destinés à fabriquer un film barrière transparent allongé et présentant des propriétés de barrière ainsi qu'une teinte stables par stabilisation et ajustement du degré d'oxydation et de l'épaisseur de film à des valeurs cibles. Le procédé de l'invention présente une étape au cours de laquelle un aluminium métallique ou un silicium sont vaporisés sur au moins une face d'un film plastique, et un film transparent barrière au gaz présentant une couche d'oxyde d'aluminium ayant un oxyde d'aluminium pour composant principal ou une couche d'oxyde de silicium ayant un oxyde de silicium pour composant principal générée en soufflant un oxygène, est fabriqué. Lors de cette étape, tout en mesurant l'épaisseur de la couche d'oxyde d'aluminium ou de la couche d'oxyde de silicium ainsi formée à l'aide d'un mesureur d'épaisseur de film mettant en œuvre des rayons X fluorescents, la transmittance lumineuse de la couche d'oxyde d'aluminium ou de la couche d'oxyde de silicium est mesurée au moyen d'un dispositif de mensure de transmittance lumineuse et régulée de manière à correspondre à une valeur prédéfinie.
(JA) 安定して酸化度と膜厚とを目的値に調整することにより長尺で安定したバリア性と色目を有した透明バリアフィルムを製造する方法及び装置であって、プラスチックフィルムの少なくとも片面に金属アルミニウム又は珪素を蒸発させ酸素を吹き込むことにより生成した酸化アルミニウムを主成分とする酸化アルミニウム層又は酸化珪素を主成分とする酸化珪素層を有する透明ガスバリアフィルムを製造する工程を有し、該工程において、形成した酸化アルミニウム層又は酸化珪素層を蛍光X線を用いた膜厚計で膜厚を測定するとともに、光線透過率測定装置で酸化アルミニウム層又は酸化珪素層の光線透過率を測定して所定の値になるように制御する。
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