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1. WO2022113443 - ROTARY FOIL TRAP AND LIGHT SOURCE DEVICE

Publication Number WO/2022/113443
Publication Date 02.06.2022
International Application No. PCT/JP2021/030807
International Filing Date 23.08.2021
IPC
G03F 7/20 2006.1
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20Exposure; Apparatus therefor
H05G 2/00 2006.1
HELECTRICITY
05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
GX-RAY TECHNIQUE
2Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
CPC
G03F 7/20
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR;
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20Exposure; Apparatus therefor
H05G 2/00
HELECTRICITY
05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
GX-RAY TECHNIQUE
2Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
Applicants
  • ウシオ電機株式会社 USHIO DENKI KABUSHIKI KAISHA [JP]/[JP]
Inventors
  • 藪田 泰伸 YABUTA Hironobu
Agents
  • 小西 恵 KONISHI Kay
  • 永岡 重幸 NAGAOKA Shigeyuki
Priority Data
2020-19507725.11.2020JP
Publication Language Japanese (ja)
Filing Language Japanese (JA)
Designated States
Title
(EN) ROTARY FOIL TRAP AND LIGHT SOURCE DEVICE
(FR) DISPOSITIF DE RETENUE EN FEUILLE ROTATIF ET DISPOSITIF DE SOURCE DE LUMIÈRE
(JA) 回転式ホイルトラップおよび光源装置
Abstract
(EN) Disclosed are: a rotary foil trap that has a relatively long period of operation lifetime without occurrence of a defect such as breakage of a foil in a short period; and a light source device provide with said rotary foil trap. A rotary foil trap (22) is disposed near plasma P generated by a plasma generation unit and performs rotation motion. The rotary foil trap (22) allows transmission therethrough of light emitted from plasma P, and captures debris given off from plasma P. The rotary foil trap (22) has: a plurality of foils (51); and a support member (hub) (53) that supports the foils (51). Each of the foils (51) is a rolled sheet obtained by stretching through rolling. The direction of the centrifugal force applied to the foil (51) by rotation motion and the rolling direction in which the foil (51) has been stretched, match or substantially match with each other.
(FR) L'invention concerne : un dispositif de retenue en feuille rotatif qui a une durée de vie relativement longue sans que n'apparaissent des défauts tels que la rupture d'une feuille dans une courte période; et un dispositif de source de lumière comprenant ledit dispositif de retenue en feuille rotatif. Un dispositif de retenue en feuille rotatif (22) est disposé à proximité du plasma P généré par une unité de génération de plasma et effectue un mouvement de rotation. Le dispositif de retenue en feuille rotatif (22) laisse passer la lumière émise par le plasma P et capture des débris produits par le plasma P. Le dispositif de retenue en feuille rotatif (22) comprend : une pluralité de feuilles (51); et un élément de support (moyeu) (53) qui supporte les feuilles (51). Chacune des feuilles (51) est une feuille laminée obtenue en effectuant un étirage par laminage. La direction de la force centrifuge appliquée à la feuille (51) par un mouvement de rotation et la direction de laminage dans laquelle la feuille (51) a été étirée correspondent ou correspondent sensiblement l'une à l'autre.
(JA) ホイルの破断といった不具合が短期間で発生することなく、比較的長期間の稼働寿命を有する回転式ホイルトラップ、およびそれを備えた光源装置を開示する。 回転式ホイルトラップ(22)は、プラズマ発生部が発生させるプラズマPの近傍に配置されて回転動作し、プラズマPから放射される光を透過し、当該プラズマPから放出されるデブリを捕捉する。回転式ホイルトラップ(22)は、複数のホイル(51)と、ホイル(51)を支持する支持部材(ハブ)(53)と、を有する。ホイル(51)は、圧延により引張加工された圧延薄板であり、回転動作によって当該ホイル(51)にかかる遠心力の方向と、ホイル(51)の引張加工された方向である圧延方向とが一致または略一致している。
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