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1. WO2022112755 - PRESSURE SENSING UNIT, VACUUM SYSTEM AND METHOD

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Publication Number WO/2022/112755
Publication Date 02.06.2022
International Application No. PCT/GB2021/053044
International Filing Date 24.11.2021
IPC
G01L 9/00 2006.1
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
G01L 19/12 2006.1
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
19Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
08Means for indicating or recording, e.g. for remote indication
12Alarms or signals
G01L 21/00 2006.1
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
21Vacuum gauges
F04D 15/00 2006.1
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
DNON-POSITIVE-DISPLACEMENT PUMPS
15Control, e.g. regulation, of pumps, pumping installations, or systems
CPC
F04B 37/14
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
37Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
10for special use
14to obtain high vacuum
F04B 49/022
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
49Control ; , e.g. of pump delivery, or pump pressure; of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
02Stopping, starting, unloading or idling control
022by means of pressure
F04B 51/00
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
51Testing machines, pumps, or pumping installations
F04C 23/02
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS
23Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
02Pumps characterised by combination with or adaptation to specific driving engines or motors
F04C 28/28
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS
28Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
28Safety arrangements; Monitoring
F04D 19/04
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
DNON-POSITIVE-DISPLACEMENT PUMPS
19Axial-flow pumps
02Multi-stage pumps
04specially adapted to the production of a high vacuum, e.g. molecular pumps
Applicants
  • EDWARDS LIMITED [GB]/[GB]
Inventors
  • NORRINGTON, Michael John
  • BARLOW, Steven Graham
Agents
  • ARNOLD, Emily
Priority Data
2018638.326.11.2020GB
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) PRESSURE SENSING UNIT, VACUUM SYSTEM AND METHOD
(FR) UNITÉ DE DÉTECTION DE PRESSION, SYSTÈME SOUS VIDE ET PROCÉDÉ
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Abstract
(EN) A pressure sensing unit, vacuum system and method are disclosed. The pressure sensing unit comprises: an inlet for connecting to a system to be monitored; a sensor configured to detect pressure, the sensor being in fluid communication with the inlet and determining circuitry configured to receive signals indicative of the detected pressure from the sensor. The determining circuitry is configured to determine a pressure and a rate of change of pressure over time from the signals. The determining circuitry comprises an output for outputting signals indicative of the determined pressure and the rate of change of pressure.
(FR) Une unité de détection de pression, un système sous vide et un procédé sont divulgués. L'unité de détection de pression comprend : une entrée destinée à être reliée à un système à surveiller ; un capteur configuré pour détecter une pression, le capteur étant en communication fluidique avec l'entrée et des circuits de détermination configurés pour recevoir des signaux indiquant la pression détectée à partir du capteur. Le circuit de détermination est configuré pour déterminer une pression et un taux de variation de pression au cours du temps à partir des signaux. Le circuit de détermination comprend une sortie pour délivrer en sortie des signaux indicatifs de la pression déterminée et de la vitesse de changement de pression.
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