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1. WO2022092803 - BELT CONVEYOR DEVICE FOR CONVEYING WAFER STORAGE CONTAINER TO BE USED IN SEMICONDUCTOR MANUFACTURING

Publication Number WO/2022/092803
Publication Date 05.05.2022
International Application No. PCT/KR2021/015209
International Filing Date 27.10.2021
IPC
H01L 21/677 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677for conveying, e.g. between different work stations
B65G 15/12 2006.1
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
15Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration
10comprising two or more co-operating endless surfaces with parallel longitudinal axes, or a multiplicity of parallel elements, e.g. ropes defining an endless surface
12with two or more endless belts
B65G 15/60 2006.1
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
15Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration
60Arrangements for supporting or guiding belts, e.g. by fluid jets
B65G 23/08 2006.1
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
23Driving gear for endless conveyors; Belt- or chain-tensioning arrangements
02Belt- or chain-engaging elements
04Drums, rollers, or wheels
08with self-contained driving mechanisms, e.g. motors and associated gearing
B65G 23/44 2006.1
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
23Driving gear for endless conveyors; Belt- or chain-tensioning arrangements
44Belt- or chain-tensioning arrangements
CPC
B65G 15/12
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
15Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration
10comprising two or more co-operating endless surfaces with parallel longitudinal axes, or a multiplicity of parallel elements, e.g. ropes defining an endless surface
12with two or more endless belts
B65G 15/60
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
15Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration
60Arrangements for supporting or guiding belts, e.g. by fluid jets
B65G 2201/0297
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
2201Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
02Articles
0297Wafer cassette
B65G 23/08
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
23Driving gear for endless conveyors; Belt- or chain-tensioning arrangements
02Belt- or chain-engaging elements
04Drums, rollers, or wheels
08with self-contained driving mechanisms, e.g. motors and associated gearing
B65G 23/44
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
23Driving gear for endless conveyors; Belt- or chain-tensioning arrangements
44Belt or chain tensioning arrangements
B65G 2812/02148
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
2812Indexing codes relating to the kind or type of conveyors
02Belt or chain conveyors
02128Belt conveyors
02138Common features for belt conveyors
02148Driving means for the belts
Applicants
  • 주식회사 세미티에스 SEMI-TS CO., LTD. [KR]/[KR]
Inventors
  • 민남홍 MIN, Nam Hong
  • 김기윤 KIM, Gi Yoon
Agents
  • 특허법인 수 SU INTELLECTUAL PROPERTY
Priority Data
10-2020-014323430.10.2020KR
Publication Language Korean (ko)
Filing Language Korean (KO)
Designated States
Title
(EN) BELT CONVEYOR DEVICE FOR CONVEYING WAFER STORAGE CONTAINER TO BE USED IN SEMICONDUCTOR MANUFACTURING
(FR) DISPOSITIF DE TRANSPORTEUR À COURROIE POUR TRANSPORTER UN RÉCIPIENT DE STOCKAGE DE TRANCHES À UTILISER DANS LA FABRICATION DE SEMICONDUCTEURS
(KO) 반도체 제조 공정에서 사용되는 웨이퍼 보관 용기의 반송을 위한 벨트 컨베이어 장치
Abstract
(EN) According to the present invention, a belt conveyor device for conveying a wafer storage container to be used in semiconductor manufacturing comprises: a conveyor body including a first side frame and a second side frame provided, respectively, at both ends of a lower frame; first_1 to first_n (wherein n is an integer of two or greater) idle rollers provided so that each one end thereof is rotatably coupled to the inner surface of the first side frame and each rotational center axis thereof is positioned colinearly, and second_1 to second_n idle rollers provided so that each one end thereof is rotatably coupled to the inner surface of the second side frame and each rotational center axis thereof is positioned colinearly; a driving roller having both ends rotatably provided in a first roller area of the first side frame and a second roller area of the second side frame, the first roller area of the first side frame formed by projecting the upper and lower surfaces of each of the first_1 to first_n idle rollers, and the second roller area of the second side frame formed by projecting the upper and lower surfaces of each of the second_1 to second_n idle rollers; and a first conveying belt provided so that the inner circumferential surface of the upper side thereof and the inner circumferential surface of the lower side thereof are in close contact with the upper and lower surfaces of each of the first_1 to first_n idle rollers and the outer circumferential surface of the upper side is in close contact with the lower surface of the driving roller, and a second conveying belt provided so that the inner circumferential surface of the upper side thereof and the inner circumferential surface of the lower side thereof are in close contact with the upper and lower surfaces of each of the second_1 to second_n idle rollers and the outer circumferential surface of the upper side is in close contact with the lower surface of the driving roller.
(FR) Selon la présente invention, un dispositif de transporteur à courroie pour transporter un récipient de stockage de tranches à utiliser dans la fabrication de semiconducteurs comprend : un corps de transporteur comprenant un premier cadre latéral et un second cadre latéral disposés, respectivement, aux deux extrémités d'un cadre inférieur ; des premier_1 à premier_n (n étant un nombre entier supérieur ou égal à deux) rouleaux libres disposés de telle sorte que chacune de leurs extrémités est couplée avec faculté de rotation à la surface interne du premier cadre latéral et chacun de leurs axes centraux de rotation de est positionné de manière colinéaire, et des second_1 à second_n rouleaux libres disposés de telle sorte que chacune de leurs extrémités est couplée avec faculté de rotation à la surface interne du second cadre latéral et chacun de leurs axes centraux de rotation est positionné de manière colinéaire ; un rouleau d'entraînement dont les deux extrémités sont disposées avec faculté de rotation dans une première zone de rouleau du premier cadre latéral et une seconde zone de rouleau du second cadre latéral, la première zone de rouleau du premier cadre latéral formée en projetant les surfaces supérieure et inférieure de chacun des premier_1 à premier_n rouleaux libres, et la seconde zone de rouleau du second cadre latéral formée en projetant les surfaces supérieure et inférieure de chacun des second_1 à second_n rouleaux libres ; et une première courroie de transport disposée de telle sorte que la surface périphérique interne de son côté supérieur et la surface périphérique interne de son côté inférieur sont en contact étroit avec les surfaces supérieure et inférieure de chacun des premier_1 à premier_n rouleaux libres et la surface périphérique externe du côté supérieur est en contact étroit avec la surface inférieure du rouleau d'entraînement, et une seconde courroie de transport disposée de telle sorte que la surface périphérique interne de son côté supérieur et la surface circonférentielle interne de son côté inférieur sont en contact étroit avec les surfaces supérieure et inférieure de chacun des second_1 à second_n rouleaux libres et que la surface périphérique externe du côté supérieur est en contact étroit avec la surface inférieure du rouleau d'entraînement.
(KO) 본 발명에 따르면, 반도체 제조 공정에서 사용되는 웨이퍼 보관 용기의 반송을 위한 벨트 컨베이어 장치로서, 하부 프레임의 양측단에 각각 설치된 제1 측면 프레임과 제2 측면 프레임을 포함하는 컨베이어 바디; 상기 제1 측면 프레임의 내측면에 각각의 일측단이 회동 가능하게 결합되며, 각각의 회동 중심축들이 동일 직선 상에 위치하도록 설치된 제1_1 아이들 롤러 내지 제1_n - 상기 n은 2 이상의 정수임 - 아이들 롤러와, 상기 제2 측면 프레임의 내측면에 각각의 일측단이 회동 가능하게 결합되며, 각각의 회동 중심축들이 동일 직선 상에 위치하도록 설치된 제2_1 아이들 롤러 내지 제2_n 아이들 롤러; 상기 제1_1 아이들 롤러 내지 상기 제1_n 아이들 롤러 각각의 상면들과 하면들이 투사되어 형성된 상기 제1 측면 프레임의 제1 롤러 영역과, 상기 제2_1 아이들 롤러 내지 상기 제2_n 아이들 롤러 각각의 상면들과 하면들이 투사되어 형성된 상기 제2 측면 프레임의 제2 롤러 영역 각각에 양측단이 회동 가능하게 설치된 구동 롤러; 및 상기 제1_1 아이들 롤러 내지 상기 제1_n 아이들 롤러 각각의 상면들과 하면들에 각각 상부측의 내주면과 하부측의 내주면이 밀착되며, 상기 구동 롤러의 하면에 상기 상부측의 외주면이 밀착되도록 설치된 제1 이송 벨트와, 상기 제2_1 아이들 롤러 내지 상기 제2_n 아이들 롤러 각각의 상면들과 하면들에 각각 상부측의 내주면과 하부측의 내주면이 밀착되며, 상기 구동 롤러의 하면에 상기 상부측의 외주면이 밀착되도록 설치된 제2 이송 벨트; 를 포함하는 벨트 컨베이어 장치가 제공된다.
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