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1. WO2022076252 - MICROELECTRONIC DEVICE CLEANING COMPOSITION

Publication Number WO/2022/076252
Publication Date 14.04.2022
International Application No. PCT/US2021/053096
International Filing Date 01.10.2021
IPC
C11D 3/30 2006.1
CCHEMISTRY; METALLURGY
11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
3Other compounding ingredients of detergent compositions covered in group C11D1/101
16Organic compounds
26containing nitrogen
30Amines; Substituted amines
C11D 3/33 2006.1
CCHEMISTRY; METALLURGY
11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
3Other compounding ingredients of detergent compositions covered in group C11D1/101
16Organic compounds
26containing nitrogen
33Amino carboxylic acids
C11D 3/48 2006.1
CCHEMISTRY; METALLURGY
11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
3Other compounding ingredients of detergent compositions covered in group C11D1/101
48Medicinal or disinfecting agents
C11D 3/43 2006.1
CCHEMISTRY; METALLURGY
11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
3Other compounding ingredients of detergent compositions covered in group C11D1/101
43Solvents
C11D 3/36 2006.1
CCHEMISTRY; METALLURGY
11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
3Other compounding ingredients of detergent compositions covered in group C11D1/101
16Organic compounds
36containing phosphorus
C11D 3/20 2006.1
CCHEMISTRY; METALLURGY
11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
3Other compounding ingredients of detergent compositions covered in group C11D1/101
16Organic compounds
20containing oxygen
CPC
C11D 11/0047
CCHEMISTRY; METALLURGY
11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
DDETERGENT COMPOSITIONS
11Special methods for preparing compositions containing mixtures of detergents
0005Special cleaning and washing methods
0011characterised by the objects to be cleaned
0023"Hard" surfaces
0047Electronic devices, e.g. PCBs, semiconductors
C11D 3/2075
CCHEMISTRY; METALLURGY
11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
DDETERGENT COMPOSITIONS
3Other compounding ingredients of detergent compositions covered in group C11D1/00
16Organic compounds
20containing oxygen
2075Carboxylic acids-salts thereof
C11D 3/28
CCHEMISTRY; METALLURGY
11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
DDETERGENT COMPOSITIONS
3Other compounding ingredients of detergent compositions covered in group C11D1/00
16Organic compounds
26containing nitrogen
28Heterocyclic compounds containing nitrogen in the ring
C11D 3/30
CCHEMISTRY; METALLURGY
11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
DDETERGENT COMPOSITIONS
3Other compounding ingredients of detergent compositions covered in group C11D1/00
16Organic compounds
26containing nitrogen
30Amines; Substituted amines ; ; Quaternized amines
C11D 3/323
CCHEMISTRY; METALLURGY
11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
DDETERGENT COMPOSITIONS
3Other compounding ingredients of detergent compositions covered in group C11D1/00
16Organic compounds
26containing nitrogen
32Amides; Substituted amides
323urea or derivatives thereof
C11D 3/33
CCHEMISTRY; METALLURGY
11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
DDETERGENT COMPOSITIONS
3Other compounding ingredients of detergent compositions covered in group C11D1/00
16Organic compounds
26containing nitrogen
33Amino carboxylic acids
Applicants
  • ENTEGRIS, INC. [US]/[US]
Inventors
  • THOMAS, Elizabeth
  • WHITE, Michael, L.
  • DAS, Atanu, K.
  • KIM, Young, Min
  • LIU, Jun
  • WHITE, Daniela
Agents
  • WHITELAW, Nicholas, S.
Priority Data
63/087,71005.10.2020US
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) MICROELECTRONIC DEVICE CLEANING COMPOSITION
(FR) COMPOSITION DE NETTOYAGE DE DISPOSITIFS MICROÉLECTRONIQUES
Abstract
(EN) A composition for cleaning a microelectronic device substrate is provided. The composition is useful for cleaning in-process microelectronic device substrates possessing exposed cobalt, molybdenum, copper, molybdenum, tungsten, and dielectric surfaces. Also provided is a method for cleaning such devices and a kit comprising one or more of the components of the composition.
(FR) L'invention concerne une composition de nettoyage d'un substrat de dispositifs microélectroniques. La composition est utile pour le nettoyage dans un processus de substrats de dispositifs microélectroniques possédant des surfaces exposées de cobalt, de molybdène, de cuivre, de tungstène et diélectriques. L'invention concerne également un procédé de nettoyage de tels dispositifs et un kit comprenant un ou plusieurs des composants de la composition.
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