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1. WO2022073613 - CARRIER TRANSPORT SYSTEM, CARRIER THEREFOR, VACUUM PROCESSING APPARATUS, AND METHOD OF TRANSPORTATION OF A CARRIER IN A VACUUM CHAMBER

Publication Number WO/2022/073613
Publication Date 14.04.2022
International Application No. PCT/EP2020/078312
International Filing Date 08.10.2020
IPC
C23C 14/56 2006.1
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
C23C 14/24 2006.1
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
24Vacuum evaporation
H01J 37/32 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes
H01L 21/677 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677for conveying, e.g. between different work stations
B65G 49/06 2006.1
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
49Conveying systems characterised by their application for specified purposes not otherwise provided for
05for fragile or damageable materials or articles
06for fragile sheets, e.g. glass
CPC
B65G 2249/02
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
2249Aspects relating to conveying systems for the manufacture of fragile sheets
02Controlled or contamination-free environments or clean space conditions
B65G 49/061
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
49Conveying systems characterised by their application for specified purposes not otherwise provided for
05for fragile or damageable materials or articles
06for fragile sheets, e.g. glass
061Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
B65G 49/063
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
49Conveying systems characterised by their application for specified purposes not otherwise provided for
05for fragile or damageable materials or articles
06for fragile sheets, e.g. glass
063Transporting devices for sheet glass
C23C 14/564
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
564Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
C23C 14/568
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
568Transferring the substrates through a series of coating stations
H01J 37/32715
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
32431Constructional details of the reactor
32715Workpiece holder
Applicants
  • APPLIED MATERIALS, INC. [US]/[US]
  • AUST, Henning [DE]/[DE] (US)
Inventors
  • AUST, Henning
Agents
  • ZIMMERMANN & PARTNER PATENTANWÄLTE MBB
Priority Data
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) CARRIER TRANSPORT SYSTEM, CARRIER THEREFOR, VACUUM PROCESSING APPARATUS, AND METHOD OF TRANSPORTATION OF A CARRIER IN A VACUUM CHAMBER
(FR) SYSTÈME DE TRANSPORT DE SUPPORT, SUPPORT S'Y RAPPORTANT, APPAREIL DE TRAITEMENT SOUS VIDE ET PROCÉDÉ DE TRANSPORT D'UN SUPPORT DANS UNE CHAMBRE À VIDE
Abstract
(EN) The present disclosure provides a carrier transport system for transporting a carrier 100 within a vacuum chamber, a method of transportation of a carrier, and an apparatus for vacuum processing of a substrate. The carrier transport system includes a track assembly having at least one passive magnetic unit (410, 610) configured to counteract a partial weight (A, B) of the carrier (100), a roller transport track (200) having a plurality of rollers (210, 210a, 210b) configured to support a total roller weight (R) of the carrier (100), a drive assembly (500) including a plurality of active magnetic drive units (510, 510a, 510b) having a first active magnetic drive unit (510a) configured for generating a first carrier drive force (Fa) having a first vector with a first angle (αa) relative to the transport direction (X), and a controller configured for active vector control of the first active magnetic drive unit (510a) to control the first angle (αa).
(FR) La présente divulgation concerne un système de transport de support pour transporter un support 100 à l'intérieur d'une chambre à vide, un procédé de transport d'un support et un appareil pour le traitement sous vide d'un substrat. Le système de transport de support comprend un ensemble piste ayant au moins une unité magnétique passive (410, 610) configurée pour contrebalancer un poids partiel (A, B) du support (100), une piste de transport de rouleau (200) ayant une pluralité de rouleaux (210, 210a, 210b) configurée pour supporter un poids de rouleau total (R) du support (100), un ensemble d'entraînement (500) comprenant une pluralité d'unités d'entraînement magnétiques actives (510, 510a, 510b) ayant une première unité d'entraînement magnétique active (510a) conçue pour générer une première force d'entraînement de support (Fa) ayant un premier vecteur ayant un premier angle (αa) par rapport à la direction de transport (X), et un dispositif de commande configuré pour une commande vectorielle active de la première unité d'entraînement magnétique active (510a) pour commander le premier angle (αa).
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