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1. WO2022070924 - INDUSTRIAL ROBOT HAND AND INDUSTRIAL ROBOT

Publication Number WO/2022/070924
Publication Date 07.04.2022
International Application No. PCT/JP2021/033964
International Filing Date 15.09.2021
IPC
H01L 21/677 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677for conveying, e.g. between different work stations
B25J 15/04 2006.1
BPERFORMING OPERATIONS; TRANSPORTING
25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; HANDLES FOR HAND IMPLEMENTS; WORKSHOP EQUIPMENT; MANIPULATORS
JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
15Gripping heads
04with provision for the remote detachment or exchange of the head or parts thereof
CPC
B25J 15/04
BPERFORMING OPERATIONS; TRANSPORTING
25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
15Gripping heads ; and other end effectors
04with provision for the remote detachment or exchange of the head or parts thereof
H01L 21/677
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
Applicants
  • 日本電産サンキョー株式会社 NIDEC SANKYO CORPORATION [JP]/[JP]
Inventors
  • 改野 重幸 KAINO, Shigeyuki
Priority Data
2020-16785802.10.2020JP
Publication Language Japanese (ja)
Filing Language Japanese (JA)
Designated States
Title
(EN) INDUSTRIAL ROBOT HAND AND INDUSTRIAL ROBOT
(FR) MAIN DE ROBOT INDUSTRIEL ET ROBOT INDUSTRIEL
(JA) 産業用ロボットのハンド、産業用ロボット
Abstract
(EN) Provided are an industrial robot hand and an industrial robot having the same that can be used differently for different purposes while minimizing manufacturing cost. A hand 14 is provided with a support unit 14b configured to be able to support one of a suction wafer mounting unit 14c and a gripping wafer mounting unit 14a. The support unit 14b comprises an air flow path 144a2 that connects to a suction hole 14c3 in a state in which the suction wafer mounting unit 14c is being supported, and one of a suction unit 147 and a gripping unit 146, the suction unit 147 including a coupling member 147a coupling the tip-end of an air pipe P with the air flow path 144a2, the gripping unit 147 being capable of pressing an end face of a wafer 2 in a state in which the gripping wafer mounting unit 14a is being supported. The hand 14 is further provided with a mounting unit for mounting the other of the suction unit 147 and the gripping unit 146.
(FR) L'invention concerne une main de robot industriel et un robot industriel la comprenant qui peuvent être utilisés différemment à des fins différentes tout en réduisant au minimum le coût de fabrication. Une main 14 est pourvue d'une unité de support 14b configurée pour pouvoir supporter un élément parmi une unité de montage de tranche d'aspiration 14c et une unité de montage de tranche de préhension 14a. L'unité de support 14b comprend un trajet d'écoulement d'air 144a2 qui se raccorde à un trou d'aspiration 14c3 dans un état dans lequel l'unité de montage de tranche d'aspiration 14c est supportée et l'une parmi une unité d'aspiration 147 et une unité de préhension 146, l'unité d'aspiration 147 comprenant un élément de couplage 147a couplant l'extrémité de pointe d'un tuyau d'air P au trajet d'écoulement d'air 144a2, l'unité de préhension 146 étant capable de presser une face d'extrémité d'une tranche 2 dans un état dans lequel l'unité de montage de tranche de préhension 14a est supportée. La main 14 est en outre pourvue d'une unité de montage pour monter l'autre unité parmi l'unité d'aspiration 147 et l'unité de préhension 146.
(JA) 製造コストを抑制しながら、用途に応じた使い分けを可能とする産業用ロボットのハンドとこれを備える産業用ロボットを提供する。ハンド14は、吸引用ウエハ搭載部14cとグリップ用ウエハ搭載部14aのいずれか一方を支持可能に構成された支持部14bを備え、支持部14bは、吸引用ウエハ搭載部14cを支持している状態にて吸引孔14c3に繋がる空気流路144a2と、空気配管Pの先端と空気流路144a2とを連結する連結部材147aを含む吸引用ユニット147、及び、グリップ用ウエハ搭載部14aを支持している状態にてウエハ2の端面を押圧可能なグリップ用ユニット146のうちの一方のみを有し、吸引用ユニット147とグリップ用ユニット146のうちの他方を取り付けるための取り付け部を更に備える。
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