WO2022026331 TIME CONSTRAINT MANAGEMENT AT A MANUFACTURING SYSTEM

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Publication Number WO/2022/026331

Publication Date 03.02.2022

International Application No. PCT/US2021/043037

International Filing Date 23.07.2021

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CPC

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Applicants

APPLIED MATERIALS, INC. [US]/[US]

Inventors

NORMAN, David E.
KAWADA, Fumio
NG, Yuh Lin

Agents

PORTNOVA, Marina
KIMES, Benjamin A.
OGURCHAK, Audrey

Priority Data

16/939,772

27.07.2020

Publication Language English (en)

Filing Language English (EN)

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Title

(EN) TIME CONSTRAINT MANAGEMENT AT A MANUFACTURING SYSTEM

(FR) GESTION DE CONTRAINTE TEMPORELLE AU NIVEAU D'UN SYSTÈME DE FABRICATION

Abstract

(EN) A method for time constraint management at a manufacturing system is provided. A first request to initiate a set of operations to be run at the manufacturing system is received. The set of operations include one or more operations that each have one or more time constraints. A first set of candidate substrates to be processed during the set of operations is determined. A first simulation of the set of operations for the first set of candidate substrates is run over a first period of time. The simulation generates a first simulation output indicate a first number of candidate substrates that were successfully processed during each of the simulated set of operations to reach the end of the first time period. The set of operations is initiated at the manufacturing system to process the first number of candidate substrates over the first time period.

(FR) L'invention concerne une gestion de contrainte temporelle au niveau d'un système de fabrication. Une première demande d'initiation d'un ensemble d'opérations à exécuter au niveau du système de fabrication est reçue. L'ensemble d'opérations comprend une ou plusieurs opérations qui ont individuellement une ou plusieurs contraintes temporelles. Un premier ensemble de substrats candidats à traiter pendant l'ensemble d'opérations est déterminé. Une première simulation de l'ensemble d'opérations du premier ensemble de substrats candidats est exécutée sur une première période de temps. La simulation génère une première sortie de simulation indiquant un premier nombre de substrats candidats qui ont été traités avec succès pendant chaque opération de l'ensemble simulé d'opérations jusqu'à atteindre la fin de la première période de temps. L'ensemble d'opérations est initié au niveau du système de fabrication de façon à traiter le premier nombre de substrats candidats sur la première période de temps.

G	PHYSICS
06	COMPUTING; CALCULATING OR COUNTING
Q	DATA PROCESSING SYSTEMS OR METHODS, SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORY OR FORECASTING PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORY OR FORECASTING PURPOSES, NOT OTHERWISE PROVIDED FOR
10	Administration; Management
06	Resources, workflows, human or project management, e.g. organising, planning, scheduling or allocating time, human or machine resources; Enterprise planning; Organisational models

G	PHYSICS
06	COMPUTING; CALCULATING OR COUNTING
Q	DATA PROCESSING SYSTEMS OR METHODS, SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORY OR FORECASTING PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORY OR FORECASTING PURPOSES, NOT OTHERWISE PROVIDED FOR
50	Systems or methods specially adapted for specific business sectors, e.g. utilities or tourism
04	Manufacturing

G	PHYSICS
06	COMPUTING; CALCULATING OR COUNTING
Q	DATA PROCESSING SYSTEMS OR METHODS, SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORY OR FORECASTING PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORY OR FORECASTING PURPOSES, NOT OTHERWISE PROVIDED FOR
10	Administration; Management
10	Office automation, e.g. computer aided management of electronic mail or groupware; Time management, e.g. calendars, reminders, meetings or time accounting

G	PHYSICS
06	COMPUTING; CALCULATING OR COUNTING
Q	DATA PROCESSING SYSTEMS OR METHODS, SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORY OR FORECASTING PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORY OR FORECASTING PURPOSES, NOT OTHERWISE PROVIDED FOR
10	Administration; Management
06	Resources, workflows, human or project management, e.g. organising, planning, scheduling or allocating time, human or machine resources; Enterprise planning; Organisational models

G	PHYSICS
06	COMPUTING; CALCULATING OR COUNTING
Q	DATA PROCESSING SYSTEMS OR METHODS, SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORY OR FORECASTING PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORY OR FORECASTING PURPOSES, NOT OTHERWISE PROVIDED FOR
50	Systems or methods specially adapted for specific business sectors, e.g. utilities or tourism
04	Manufacturing

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1. WO2022026331 - TIME CONSTRAINT MANAGEMENT AT A MANUFACTURING SYSTEM

G	PHYSICS
05	CONTROLLING; REGULATING
B	CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
19	Programme-control systems
02	electric
418	Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
41805	characterised by assembly

H	ELECTRICITY
01	BASIC ELECTRIC ELEMENTS
L	SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
31	Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
18	Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
1892	methods involving the use of temporary, removable substrates