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1. WO2022026067 - METHODS TO FABRICATE 2D WEDGE AND LOCALIZED ENCAPSULATION FOR DIFFRACTIVE OPTICS

Publication Number WO/2022/026067
Publication Date 03.02.2022
International Application No. PCT/US2021/037357
International Filing Date 15.06.2021
IPC
G02B 5/18 2006.1
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
5Optical elements other than lenses
18Diffracting gratings
B29D 11/00 2006.1
BPERFORMING OPERATIONS; TRANSPORTING
29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
DPRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
11Producing optical elements, e.g. lenses or prisms
CPC
G02B 6/34
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
6Light guides
24Coupling light guides
26Optical coupling means
34utilising prism or grating
G03F 7/16
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR;
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
16Coating processes; Apparatus therefor
G03F 7/30
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR;
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
26Processing photosensitive materials; Apparatus therefor
30Imagewise removal using liquid means
Applicants
  • APPLIED MATERIALS, INC. [US]/[US]
Inventors
  • GUO, Jinrui
  • GODET, Ludovic
  • ZHANG, Daihua
  • LUO, Kang
  • HOURANI, Rami
Agents
  • PATTERSON, B. Todd
  • VERSTEEG, Steven H.
Priority Data
17/033,20125.09.2020US
63/059,82631.07.2020US
63/081,96123.09.2020US
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) METHODS TO FABRICATE 2D WEDGE AND LOCALIZED ENCAPSULATION FOR DIFFRACTIVE OPTICS
(FR) PROCÉDÉS DE FABRICATION DE COIN 2D ET ENCAPSULATION LOCALISÉE POUR SYSTÈME OPTIQUE DIFFRACTIF
Abstract
(EN) A method of forming a three dimensional feature inwardly of a surface of a material includes providing a droplet dispenser including an outlet configured to dispense discrete droplets of a liquid material having a reactant therein capable of reacting with, and thereby removing, portions of the material layer with which the droplets come into contact, providing a support configured support the material thereon, the support, and the droplet dispenser, movable with respect to one another, such that the outlet of the droplet dispenser is positionable over different discrete areas of the surface of the material, and positioning the surface of the material under the droplet dispenser, and dispensing droplets to discrete portions of the surface of the material in a desired area thereof, to remove at least a portion of the material in the desired area and thereby form a three dimensional recess inwardly of the surface of the material.
(FR) L'invention concerne un procédé de formation d'une caractéristique tridimensionnelle vers l'intérieur d'une surface d'un matériau consistant : à faire intervenir un distributeur de gouttelettes comprenant une sortie conçue pour distribuer des gouttelettes distinctes d'un matériau liquide contenant un réactif pouvant générer une réaction, ce qui permet d'éliminer des parties de la couche de matériau avec lesquelles les gouttelettes entrent en contact; à faire intervenir un support conçu pour maintenir le matériau sur celui-ci, le support et le distributeur de gouttelettes pouvant se déplacer l'un par rapport à l'autre, de telle sorte que la sortie du distributeur de gouttelettes puisse être positionnée sur différentes zones distinctes de la surface du matériau; à positionner la surface du matériau sous le distributeur de gouttelettes et à distribuer des gouttelettes à des parties distinctes de la surface du matériau dans une zone souhaitée de celui-ci, pour retirer au moins une partie du matériau dans la zone souhaitée et former ainsi un évidement tridimensionnel vers l'intérieur de la surface du matériau.
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