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1. WO2022025012 - OPTICAL SCANNING DEVICE, METHOD FOR DRIVING SAME, AND IMAGE DRAWING SYSTEM

Publication Number WO/2022/025012
Publication Date 03.02.2022
International Application No. PCT/JP2021/027606
International Filing Date 26.07.2021
Chapter 2 Demand Filed 14.01.2022
IPC
G02B 26/10 2006.1
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
26Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating or modulating
08for controlling the direction of light
10Scanning systems
B81B 3/00 2006.1
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
3Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
G02B 26/08 2006.1
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
26Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating or modulating
08for controlling the direction of light
H02N 2/04 2006.1
HELECTRICITY
02GENERATION, CONVERSION, OR DISTRIBUTION OF ELECTRIC POWER
NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
2Electric machines in general using piezo-electric effect, electrostriction or magnetostriction
02producing linear motion, e.g. actuators; Linear positioners
04Constructional details
H02N 2/06 2006.1
HELECTRICITY
02GENERATION, CONVERSION, OR DISTRIBUTION OF ELECTRIC POWER
NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
2Electric machines in general using piezo-electric effect, electrostriction or magnetostriction
02producing linear motion, e.g. actuators; Linear positioners
06Drive circuits; Control arrangements
CPC
B81B 3/00
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
3Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
G02B 26/08
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
26Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
08for controlling the direction of light
G02B 26/10
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
26Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
08for controlling the direction of light
10Scanning systems
H02N 2/04
HELECTRICITY
02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
2Electric machines in general using piezo-electric effect, electrostriction or magnetostriction
02producing linear motion, e.g. actuators; Linear positioners ; ; Linear motors
04Constructional details
H02N 2/06
HELECTRICITY
02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
2Electric machines in general using piezo-electric effect, electrostriction or magnetostriction
02producing linear motion, e.g. actuators; Linear positioners ; ; Linear motors
06Drive circuits; Control arrangements ; or methods
Applicants
  • 富士フイルム株式会社 FUJIFILM CORPORATION [JP]/[JP]
Inventors
  • 菱沼 慶一 HISHINUMA, Yoshikazu
  • 直野 崇幸 NAONO, Takayuki
Agents
  • 特許業務法人太陽国際特許事務所 TAIYO, NAKAJIMA & KATO
Priority Data
2020-13062731.07.2020JP
Publication Language Japanese (ja)
Filing Language Japanese (JA)
Designated States
Title
(EN) OPTICAL SCANNING DEVICE, METHOD FOR DRIVING SAME, AND IMAGE DRAWING SYSTEM
(FR) DISPOSITIF DE BALAYAGE OPTIQUE, SON PROCÉDÉ DE COMMANDE ET SYSTÈME DE DESSIN D'IMAGE
(JA) 光走査装置、その駆動方法、及び画像描画システム
Abstract
(EN) An optical scanning device comprising: a mirror unit having a reflection surface that reflects incident light; a first actuator that rocks the mirror unit around a first axis located in a plane including the reflection surface of the mirror unit in a stationary state; a second actuator that rocks the mirror unit around a second axis located in the plane including the reflection surface of the mirror unit in the stationary state and orthogonal to the first axis; a pair of first angle detection sensors that output signals which depend on the angle of the mirror unit around the first axis, the pair of first angle detection sensors being disposed at positions facing each other across the first axis or the second axis; and at least one processor, wherein the processor generates a first angle detection signal representing the angle of the mirror unit around the first axis through addition or subtraction of a pair of first output signals output from the pair of first angle detection sensors.
(FR) L'invention concerne un dispositif de balayage optique qui comprend : une unité de miroir ayant une surface de réflexion qui réfléchit une lumière incidente; un premier actionneur qui fait basculer l'unité de miroir autour d'un premier axe situé dans un plan comprenant la surface de réflexion de l'unité de miroir dans un état stationnaire; un second actionneur qui fait basculer l'unité de miroir autour d'un second axe situé dans le plan comprenant la surface de réflexion de l'unité de miroir dans l'état stationnaire et orthogonal au premier axe; une paire de premiers capteurs de détection d'angle qui émettent des signaux qui dépendent de l'angle de l'unité de miroir autour du premier axe, la paire de premiers capteurs de détection d'angle étant disposés à des positions se faisant face l'un par rapport à l'autre sur le premier axe ou le second axe; et au moins un processeur, le processeur générant un premier signal de détection d'angle représentant l'angle de l'unité miroir autour du premier axe par addition ou soustraction d'une paire de premiers signaux de sortie émis par la paire de premiers capteurs de détection d'angle.
(JA) 入射光を反射する反射面を有するミラー部と、ミラー部の静止時の反射面を含む平面内にある第1軸の周りにミラー部を揺動させる第1アクチュエータと、ミラー部の静止時の反射面を含む平面内であって第1軸に直交する第2軸の周りにミラー部を揺動させる第2アクチュエータと、ミラー部の第1軸周りの角度に応じた信号を出力する一対の第1角度検出センサであって、第1軸又は第2軸を挟んで対向する位置に配置された一対の第1角度検出センサと、少なくとも1つのプロセッサと、を備える光走査装置であって、プロセッサは、一対の第1角度検出センサから出力された一対の第1出力信号を加算又は減算することにより、ミラー部の第1軸周りの角度を表す第1角度検出信号を生成する。
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