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1. WO2022011315 - ION CURRENT DROOP COMPENSATION

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Publication Number WO/2022/011315
Publication Date 13.01.2022
International Application No. PCT/US2021/041180
International Filing Date 09.07.2021
IPC
H01J 37/32 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes
H01J 37/34 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes
34operating with cathodic sputtering
H01J 37/36 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes
36for cleaning surfaces while plating with ions of materials introduced into the discharge, e.g. introduced by evaporation
H02M 1/34 2007.1
HELECTRICITY
02GENERATION, CONVERSION, OR DISTRIBUTION OF ELECTRIC POWER
MAPPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
1Details of apparatus for conversion
32Means for protecting converters other than by automatic disconnection
34Snubber circuits
CPC
H01J 37/32128
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
32082Radio frequency generated discharge
32128using particular waveforms, e.g. polarised waves
H01J 37/32146
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
32082Radio frequency generated discharge
32137controlling of the discharge by modulation of energy
32146Amplitude modulation, includes pulsing
H01J 37/32174
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
32082Radio frequency generated discharge
32174Circuits specially adapted for controlling the RF discharge
Applicants
  • EAGLE HARBOR TECHNOLOGIES, INC. [US]/[US]
Inventors
  • BOWMAN, Christopher
  • LISTON, Connor
  • MILLER, Kenneth
  • ZIEMBA, Timothy
Agents
  • SANDERS, Jason, A.
Priority Data
63/049,90709.07.2020US
63/087,15002.10.2020US
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) ION CURRENT DROOP COMPENSATION
(FR) COMPENSATION DE CHUTE DE COURANT IONIQUE
front page image
Abstract
(EN) In some embodiments, a high voltage power supply is disclosed that provides a plurality of high voltage pulses without any voltage droop between two subsequent pulses. In some embodiments, a high voltage power supply is disclosed that provides a waveform of voltage versus time having a plurality of high voltage pulses having a voltage greater than 1 kV and with a substantially flat portion between pulse. In some embodiments, a high voltage power supply is disclosed that includes a snubber with a snubber resistor having a resistance of about 7.5 mΩ - 1.25 Ω; and a snubber capacitor having a capacitance of about 2 μF - 35 μF.
(FR) Selon certains modes de réalisation, l'invention divulgue une alimentation électrique haute tension qui fournit une pluralité d'impulsions haute tension sans aucune chute de tension entre deux impulsions successives. Selon certains autres modes de réalisation, l'invention divulgue une alimentation électrique haute tension qui fournit une forme d'onde de tension en fonction du temps comportant une pluralité d'impulsions haute tension ayant une tension supérieure à 1 kV et avec une partie sensiblement plate entre impulsions. Selon encore certains autres modes de réalisation, l'invention divulgue une alimentation électrique haute tension comprenant une protection dotée d'une résistance de protection ayant une résistance d'environ 7,5 mΩ à 1,25 Ω ; et un condensateur de protection ayant une capacité d'environ 2 μF à 35 μF.
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