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1. WO2022010557 - MULTIPLE-CHANNEL SHOWERHEAD DESIGN AND METHODS IN MANUFACTURING

Publication Number WO/2022/010557
Publication Date 13.01.2022
International Application No. PCT/US2021/026968
International Filing Date 13.04.2021
IPC
C23C 16/455 2006.1
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
16Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (CVD) processes
44characterised by the method of coating
455characterised by the method used for introducing gases into the reaction chamber or for modifying gas flows in the reaction chamber
Applicants
  • APPLIED MATERIALS, INC. [US]/[US]
Inventors
  • DAITO, Kazuya
  • JALLEPALLY, Ravi
  • SINGH, Harpreet
Agents
  • PATTERSON, B. Todd
  • STEVENS, Joseph J.
Priority Data
16/923,40308.07.2020US
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) MULTIPLE-CHANNEL SHOWERHEAD DESIGN AND METHODS IN MANUFACTURING
(FR) CONCEPTION DE POMME DE DOUCHE À CANAUX MULTIPLES ET PROCÉDÉS DE FABRICATION
Abstract
(EN) A method and apparatus for producing a gas distribution apparatus are described herein. More specifically, a method and apparatus for producing triplechannel gas distribution apparatus is described herein. The gas distribution apparatus described herein includes an upper plate, a middle plate, and a lower plate. The middle plate and the lower plate are machined before all of the upper plate, the middle plate, and the lower plate are bonded. Additional machining is then performed on the gas distribution apparatus. The gas distribution apparatus is used to distribute three or more process gases into a processing chamber.
(FR) Sont décrits ici, un procédé et un appareil de production d'un appareil de distribution de gaz. En particulier, sont décrits ici, un procédé et un appareil de production d'un appareil de distribution de gaz à canaux triples. L'appareil de distribution de gaz décrit ici comprend une plaque supérieure, une plaque intermédiaire et une plaque inférieure. La plaque intermédiaire et la plaque inférieure sont usinées avant l'assemblage de la plaque supérieure, de la plaque intermédiaire et de la plaque inférieure. Un usinage supplémentaire est ensuite effectué sur l'appareil de distribution de gaz. L'appareil de distribution de gaz est utilisé pour distribuer au moins trois gaz de traitement dans une chambre de traitement.
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