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1. WO2022010108 - DEPOSITION APPARATUS

Publication Number WO/2022/010108
Publication Date 13.01.2022
International Application No. PCT/KR2021/006971
International Filing Date 03.06.2021
IPC
C23C 14/26 2006.1
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
24Vacuum evaporation
26by resistance or inductive heating of the source
C23C 14/24 2006.1
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
24Vacuum evaporation
Applicants
  • 엘지전자 주식회사 LG ELECTRONICS INC. [KR]/[KR]
Inventors
  • 문병준 MOON, Byoungjun
  • 김선기 KIM, Sunkee
  • 조영수 CHO, Youngsoo
  • 이용환 LEE, Yonghwan
Agents
  • 허용록 HAW, Yong Noke
Priority Data
10-2020-008565810.07.2020KR
Publication Language Korean (ko)
Filing Language Korean (KO)
Designated States
Title
(EN) DEPOSITION APPARATUS
(FR) APPAREIL DE DÉPÔT
(KO) 증착 장치
Abstract
(EN) A deposition apparatus can comprise: a crucible in which a metal material is placed; a reflector for encompassing the outer circumference of the crucible; a heater bracket provided on the reflector; a heating wire fixed to the heater bracket; and a heating wire cover which is placed between the wire and the crucible and which is a nonconductor, and, during leaking of conductive gas, the simple structure of the heating wire cover can prevent the conductive gas from being deposited on the heating wire. In addition, a groove in which the heating wire is inserted and accommodated can be formed on the outer circumferential surface of the heating wire cover.
(FR) La présente invention concerne un appareil de dépôt qui peut comprendre : un creuset dans lequel un matériau métallique est placé ; un réflecteur pour couvrir la circonférence externe du creuset ; un support de chauffage disposé sur le réflecteur ; un fil chauffant fixé au support de dispositif de chauffage ; et une couverture de fil chauffant qui est placée entre le fil et le creuset et qui est un non-conducteur, et, pendant la fuite de gaz conducteur, la structure simple de couverture de fil chauffant peut empêcher le gaz conducteur d’être déposé sur le fil chauffant. De plus, une rainure dans laquelle le fil chauffant est inséré et reçu peut être formée sur la surface circonférentielle externe de la couverture de fil chauffant.
(KO) 증착 장치는 금속 물질이 담겨지는 도가니와, 도가니의 외둘레를 둘러싸는 리플렉터와, 리플렉터에 설치된 히터 브라켓과, 히터 브라켓에 고정된 열선과, 선과 도가니 사이에 배치되고 부도체인 열선 커버를 포함할 수 있고, 도전성 기체의 누설시, 도전성 기체가 열선에 증착되는 것을 열선 커버의 간단한 구조로 막을 수 있다. 또한, 열선 커버는 외둘레면에 열선이 삽입되어 수용되는 그루브가 형성될 수 있다.
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