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1. WO2022009775 - TOF SENSOR

Publication Number WO/2022/009775
Publication Date 13.01.2022
International Application No. PCT/JP2021/024979
International Filing Date 01.07.2021
IPC
G01S 7/4863 2020.1
GPHYSICS
01MEASURING; TESTING
SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
7Details of systems according to groups G01S13/, G01S15/, G01S17/127
48of systems according to group G01S17/58
483Details of pulse systems
486Receivers
4861Circuits for detection, sampling, integration or read-out
4863Detector arrays, e.g. charge-transfer gates
G01S 17/894 2020.1
GPHYSICS
01MEASURING; TESTING
SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
17Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
88Lidar systems, specially adapted for specific applications
89for mapping or imaging
8943D imaging with simultaneous measurement of time-of-flight at a 2D array of receiver pixels, e.g. time-of-flight cameras or flash lidar
H01L 27/146 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
27Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
14including semiconductor components sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
144Devices controlled by radiation
146Imager structures
H04N 5/376 2011.1
HELECTRICITY
04ELECTRIC COMMUNICATION TECHNIQUE
NPICTORIAL COMMUNICATION, e.g. TELEVISION
5Details of television systems
30Transforming light or analogous information into electric information
335using solid-state image sensors
369SSIS architecture; Circuitry associated therewith
376Addressing circuits
Applicants
  • Gpixel Japan株式会社 GPIXEL JAPAN CO., LTD. [JP]/[JP]
Inventors
  • ボガーツ ヤン BOGAERTS Jan
  • 原田 真吾 HARADA Shingo
Agents
  • 特許業務法人クレイア特許事務所 CREIA IP ATTORNEYS
Priority Data
2020-11920110.07.2020JP
Publication Language Japanese (ja)
Filing Language Japanese (JA)
Designated States
Title
(EN) TOF SENSOR
(FR) CAPTEUR TEMPS DE VOL
(JA) TOFセンサ
Abstract
(EN) [PROBLEM] To provide a TOF sensor equipped with a wiring structure that makes it possible to reduce pixel-by-pixel variation in the propagation delay time of a high-speed clock signal connected to the transfer gate of each pixel. [Solution] This TOF sensor 200 comprises a pixel area 30 and a clock buffer area 20 arranged on one end side of the pixel area in the Y-direction thereof. Single pixels 40 or unit pixel groups 36 configured from a plurality of pixels are arranged in a two-dimensional matrix in the pixel area 30, a plurality of clocks for driving transfer gates 42 are each binarily split in the X-direction in the clock buffer area 20 and input to a final stage clock buffer 22 for driving unit pixel group rows 35 in which the unit pixel groups 36 are arranged in the Y-direction, and the output of the clock buffer 22 is binarily split in the Y-direction and connected to the transfer gates 42 of the unit pixel group rows 35.
(FR) Le problème à résoudre par la présente invention est de fournir un capteur TOF équipé d'une structure de câblage permettant de réduire la variation pixel par pixel du temps de retard de propagation d'un signal d'horloge à grande vitesse connecté à la grille de transfert de chaque pixel. La solution selon l'invention porte sur un capteur TOF (200) qui comprend une zone de pixels (30) et une zone tampon d'horloge (20) disposée sur un côté d'extrémité de la zone de pixels dans la direction Y de cette dernière. Des pixels uniques (40) ou des groupes de pixels unitaires (36) configurés à partir d'une pluralité de pixels sont agencés dans une matrice bidimensionnelle dans la zone de pixels (30), une pluralité d'horloges permettant de piloter des grilles de transfert (42) sont chacune divisées de manière binaire dans la direction X dans la zone tampon d'horloge (20) et entrées dans un tampon d'horloge d'étape finale (22) afin de piloter des rangées de groupes de pixels unitaires (35) dans lesquelles les groupes de pixels unitaires (36) sont agencés dans la direction Y, et la sortie du tampon d'horloge (22) est divisée de manière binaire dans la direction Y et connectée aux grilles de transfert (42) des rangées de groupes de pixels unitaires (35).
(JA) 【課題】各画素の転送ゲートに接続される高速クロック信号の伝搬遅延時間の画素ごとのばらつきを小さくすることのできる配線構造を備えたTOFセンサを提供する。 【解決方法】TOFセンサ200は、画素領域30と画素領域のY方向の一端側に配置されるクロックバッファ領域20とを備え、画素領域30には、単独の画素40、または、複数の画素から構成された単位画素群36が2次元配列され、転送ゲート42の駆動する複数のクロックはそれぞれ、クロックバッファ領域20においてX方向にバイナリー分岐されて、単位画素群36がY方向に配列された単位画素群列35を駆動する最終段のクロックバッファ22に入力され、クロックバッファ22の出力は、Y方向においてバイナリー分岐されて、単位画素群列35の転送ゲート42に接続される。
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