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1. WO2022009604 - PRESSURE SENSOR ELEMENT, PRESSURE SENSOR MODULE, AND SIGNAL CORRECTION METHOD FOR SAME

Publication Number WO/2022/009604
Publication Date 13.01.2022
International Application No. PCT/JP2021/022241
International Filing Date 11.06.2021
IPC
G01L 9/00 2006.1
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
G01L 9/12 2006.1
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
12by making use of variations in capacitance
G01L 19/04 2006.1
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
19Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
04Means for compensating for effects of changes of temperature
Applicants
  • 株式会社村田製作所 MURATA MANUFACTURING CO., LTD. [JP]/[JP]
Inventors
  • 杉林 英明 SUGIBAYASHI, Hideaki
Agents
  • 山尾 憲人 YAMAO, Norihito
  • 徳山 英浩 TOKUYAMA, Hidehiro
Priority Data
2020-11654706.07.2020JP
Publication Language Japanese (ja)
Filing Language Japanese (JA)
Designated States
Title
(EN) PRESSURE SENSOR ELEMENT, PRESSURE SENSOR MODULE, AND SIGNAL CORRECTION METHOD FOR SAME
(FR) ÉLÉMENT CAPTEUR DE PRESSION, MODULE CAPTEUR DE PRESSION ET PROCÉDÉ DE CORRECTION DE SIGNAL POUR CELUI-CI
(JA) 圧力センサ素子、圧力センサモジュールおよびその信号補正方法
Abstract
(EN) The present invention pertains to a pressure sensor element that detects a change in capacitance between electrodes. A pressure sensor element 1 comprises an electrically insulating substrate 10, a base electrode layer 20, spacer parts 30, 31, a guard electrode layer 30A, a membrane plate 40, and the like. A sensing electrode S serving as a sensing electrode section and monitoring electrodes M1-M4 serving as a monitoring electrode section are installed on the membrane plate 40 so as to face the substrate 10. The monitoring electrodes M1-M4 detect stress and strain generated in the spacer parts 30, 31 when mounted on a circuit board. Through such a configuration, high measurement precision can be realized even after mounting on a circuit board.
(FR) La présente invention concerne un élément capteur de pression qui détecte un changement de capacité entre des électrodes. Un élément capteur de pression (1) comprend un substrat électriquement isolant (10), une couche d'électrode de base (20), des parties d'espaceur (30, 31), une couche d'électrode de protection (30A), une plaque de membrane (40) et analogues. Une électrode de détection (S) servant de section d'électrode de détection et des électrodes de surveillance M1-M4 servant de section d'électrode de surveillance sont installées sur la plaque de membrane (40), de façon à faire face au substrat (10). Les électrodes de surveillance M1-M4 détectent une contrainte et une tension générées dans les parties d'espaceur (30, 31) lorsqu'elles sont montées sur une carte de circuit imprimé. Grâce à une telle configuration, il est possible d'atteindre une précision de mesure élevée, même après un montage sur une carte de circuit imprimé.
(JA) 本発明は、電極間の静電容量の変化を検知する圧力センサ素子に関する。圧力センサ素子1は、電気絶縁性の基板10と、ベース電極層20と、スペーサ部30,31と、ガード電極層30Aと、メンブレンプレート40などを備える。メンブレンプレート40には、センス電極部としてのセンス電極Sおよびモニタ電極部としてのモニタ電極M1~M4が基板10と対向するように設置される。モニタ電極M1~M4は、回路基板に実装された場合にスペーサ部30,31に生ずる応力歪みを検知する。 こうした構成により、回路基板に実装した後でも高い測定精度を実現できる。
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