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1. WO2022009580 - CARBIDE-COATED CARBON MATERIAL

Publication Number WO/2022/009580
Publication Date 13.01.2022
International Application No. PCT/JP2021/021580
International Filing Date 07.06.2021
IPC
C01B 32/00 2017.1
CCHEMISTRY; METALLURGY
01INORGANIC CHEMISTRY
BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF
32Carbon; Compounds thereof
C01B 32/914 2017.1
CCHEMISTRY; METALLURGY
01INORGANIC CHEMISTRY
BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF
32Carbon; Compounds thereof
90Carbides
914Carbides of single elements
C23C 16/32 2006.1
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
16Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (CVD) processes
22characterised by the deposition of inorganic material, other than metallic material
30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
32Carbides
CPC
C01B 32/00
CCHEMISTRY; METALLURGY
01INORGANIC CHEMISTRY
BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; ; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
32Carbon; Compounds thereof
C01B 32/914
CCHEMISTRY; METALLURGY
01INORGANIC CHEMISTRY
BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; ; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
32Carbon; Compounds thereof
90Carbides
914Carbides of single elements
C23C 16/32
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
16Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
22characterised by the deposition of inorganic material, other than metallic material
30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
32Carbides
Applicants
  • 信越化学工業株式会社 SHIN-ETSU CHEMICAL CO., LTD. [JP]/[JP]
Inventors
  • 平手 暁大 HIRATE, Akihiro
  • 山村 和市 YAMAMURA, Waichi
Agents
  • 田口 昌浩 TAGUCHI, Masahiro
  • 虎山 滋郎 TORAYAMA, Jiro
  • 伊藤 高志 ITO, Takashi
  • 鈴木 康義 SUZUKI, Yasuyoshi
Priority Data
2020-11685307.07.2020JP
Publication Language Japanese (ja)
Filing Language Japanese (JA)
Designated States
Title
(EN) CARBIDE-COATED CARBON MATERIAL
(FR) MATÉRIAU CARBONÉ REVÊTU DE CARBURE
(JA) 炭化物被覆炭素材料
Abstract
(EN) This carbide-coated carbon material (1) is characterized by comprising a base material (10) having carbon as the main component and containing chlorine, and, provided above the base material (10), a carbide layer (20) having carbide as the main component and containing chlorine, wherein the base material (10) contains, in the vicinity of the boundary with the carbide layer, a base material buffer region (11) having a chlorine concentration that changes continuously in the direction of the carbide layer, the carbide layer (20) contains, in the vicinity of the boundary with the base material, a carbide layer buffer region (21) having a chlorine concentration that changes continuously in the direction of the base material, and the maximum value of the chlorine concentration in the base material buffer region (11) and the carbide layer buffer region (21) is 10,000 ppm or lower. The present invention allows a carbide-coated carbon material to be provided, having a sufficient tight-contact strength at the boundary between the carbide layer and the base material having carbon as the main component.
(FR) Ce matériau carboné revêtu de carbure (1) est caractérisé en ce qu'il comprend un matériau de base (10) ayant du carbone comme composant principal et contenant du chlore, et, disposée au-dessus du matériau de base (10), une couche de carbure (20) ayant du carbure comme composant principal et contenant du chlore, le matériau de base (10) contenant, au voisinage de la limite avec la couche de carbure, une région tampon de matériau de base (11) ayant une concentration en chlore qui change en continu dans la direction de la couche de carbure, la couche de carbure (20) contenant, au voisinage de la limite avec le matériau de base, une région tampon de couche de carbure (21) ayant une concentration en chlore qui change en continu dans la direction du matériau de base, et la valeur maximale de la concentration en chlore dans la région tampon de matériau de base (11) et de la région tampon de couche de carbure (21) est inférieure ou égale à 10 000 ppm. La présente invention permet de fournir un matériau carboné revêtu de carbure, ayant une résistance de contact étroit suffisante à la limite entre la couche de carbure et le matériau de base ayant du carbone en tant que composant principal.
(JA) 本発明の炭化物被覆炭素材料(1)は、炭素を主成分とし、塩素を含む基材(10)と、基材(10)の上に設けられた、炭化物を主成分とし、塩素を含む炭化物層(20)とを備え、基材(10)が、炭化物層との界面近傍に、塩素濃度が炭化物層への方向に対して連続的に変化する基材緩衝領域(11)を有し、炭化物層(20)が、基材との界面近傍に、塩素濃度が基材への方向に対して連続的に変化する炭化物層緩衝領域(21)を有し、基材緩衝領域(11)および炭化物層緩衝領域(21)の塩素濃度の最大値が10000ppm以下であることを特徴とする。本発明によれば、炭化物層と炭素を主成分とする基材との界面において十分な密着強度を有する炭化物被覆炭素材料を提供することができる。
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