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1. WO2022009430 - SUBSTRATE STORAGE CONTAINER

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Publication Number WO/2022/009430
Publication Date 13.01.2022
International Application No. PCT/JP2020/027104
International Filing Date 10.07.2020
IPC
H01L 21/673 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
673using specially adapted carriers
CPC
H01L 21/673
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
673using specially adapted carriers ; or holders; Fixing the workpieces on such carriers or holders
Applicants
  • ミライアル株式会社 MIRAIAL CO., LTD. [JP]/[JP]
Inventors
  • 松鳥　千明 MATSUTORI Chiaki
Agents
  • 正林　真之 SHOBAYASHI Masayuki
  • 林　一好 HAYASHI Kazuyoshi
  • 岩池　満 IWAIKE Mitsuru
Priority Data
Publication Language Japanese (ja)
Filing Language Japanese (JA)
Designated States
Title
(EN) SUBSTRATE STORAGE CONTAINER
(FR) RÉCIPIENT DE STOCKAGE DE SUBSTRAT
(JA) 基板収納容器
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Abstract
(EN) This substrate storage container is provided with: a container main body; a lid body which is attachable to and detachable from an opening of the container main body, and which is able to close the opening of the container main body; and a component 81 which is fitted to the container main body or to the lid body. The connected portion between the component 81 and the container main body, the lid body or other components 82, 83 is provided with: press fitting parts 8101, 8201 which are positioned by means of fitting, while being affixed to each other; and impulse welding parts 8102, 8202 which are formed by impulse welding so as to maintain the positioning and affixing of the press fitting parts 8101, 8201.
(FR) La présente invention concerne un récipient de stockage de substrat qui comporte : un corps principal de récipient ; un corps de couvercle qui peut être fixé à une ouverture du corps principal de récipient et détaché de celle-ci et qui est apte à fermer l'ouverture du corps principal de récipient ; et un composant (81) qui est monté sur le corps principal de récipient ou sur le corps de couvercle. La portion raccordée entre le composant (81) et le corps principal de récipient, le corps de couvercle ou d'autres composants (82, 83) comporte : des parties d'ajustement à la presse (8101, 8201) qui sont positionnées au moyen d'un ajustement, tout en étant fixées l'une à l'autre ; et des parties de soudage par impulsions (8102, 8202) qui sont formées par soudage par impulsions de façon à maintenir le positionnement et la fixation des parties d'ajustement à la presse (8101, 8201).
(JA) 容器本体と、容器本体開口部に対して着脱可能であり、容器本体開口部を閉塞可能な蓋体と、容器本体又は蓋体に取り付けられる部品８１と、を備え、部品８１と容器本体又は蓋体又は他の部品８２、８３との接続部分は、圧入による位置決めがなされて互いに固定されて構成された圧入固定部８１０１、８２０１と、インパルス溶着により形成され、圧入固定部８１０１、８２０１における位置決め及び固定を維持するインパルス溶着部８１０２、８２０２と、を備える基板収納容器である。
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