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1. WO2022008903 - METHODS FOR USE IN THE SPATIAL REGISTRATION OF OBJECTS

Publication Number WO/2022/008903
Publication Date 13.01.2022
International Application No. PCT/GB2021/051722
International Filing Date 06.07.2021
IPC
H01L 21/68 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
68for positioning, orientation or alignment
H01L 23/00 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
23Details of semiconductor or other solid state devices
G03F 9/00 2006.1
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
9Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
G06T 7/33 2017.1
GPHYSICS
06COMPUTING; CALCULATING OR COUNTING
TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
7Image analysis
30Determination of transform parameters for the alignment of images, i.e. image registration
33using feature-based methods
CPC
G03F 9/7088
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR;
9Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
70for microlithography
7088Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection
G06T 2207/10016
GPHYSICS
06COMPUTING; CALCULATING; COUNTING
TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
2207Indexing scheme for image analysis or image enhancement
10Image acquisition modality
10016Video; Image sequence
G06T 2207/30148
GPHYSICS
06COMPUTING; CALCULATING; COUNTING
TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
2207Indexing scheme for image analysis or image enhancement
30Subject of image; Context of image processing
30108Industrial image inspection
30148Semiconductor; IC; Wafer
G06T 2207/30204
GPHYSICS
06COMPUTING; CALCULATING; COUNTING
TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
2207Indexing scheme for image analysis or image enhancement
30Subject of image; Context of image processing
30204Marker
G06T 7/33
GPHYSICS
06COMPUTING; CALCULATING; COUNTING
TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
7Image analysis
30Determination of transform parameters for the alignment of images, i.e. image registration
33using feature-based methods
H01L 2224/75753
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
2224Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
75Apparatus for connecting with bump connectors or layer connectors
757Means for aligning
75753Means for optical alignment, e.g. sensors
Applicants
  • UNIVERSITY OF STRATHCLYDE [GB]/[GB]
Inventors
  • STRAIN, Michael
Agents
  • MARKS & CLERK LLP
Priority Data
2010350.306.07.2020GB
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) METHODS FOR USE IN THE SPATIAL REGISTRATION OF OBJECTS
(FR) PROCÉDÉS ET APPAREIL DESTINÉS À ÊTRE UTILISÉS DANS L'ENREGISTREMENT SPATIAL D'OBJETS
Abstract
(EN) A method for use in the spatial registration of first and second objects comprises fixing the first and second objects to the same motion control stage in an unknown spatial relationship, using an imaging system to acquire an image of the first object, determining a position and orientation of the first object in a frame of reference of the motion control stage based at least in part on the acquired image of the first object, using the imaging system to acquire an image of the second object, and determining a position and orientation of the second object in the frame of reference of the motion control stage based at least in part on the acquired image of the second object. The method may be used in the spatial registration of first and second objects and, in particular though not exclusively, for use in the spatial registration of optical or electronic components relative to one another, or for use in the alignment of a first object such as an optical or electronic component relative to a second object such as a feature, a structure, a target area or a target region defined on a substrate or a wafer.
(FR) Est décrit un procédé destiné à être utilisé dans l'enregistrement spatial de premier et second objets, comprenant les étapes consistant à fixer les premier et second objets au même étage de commande de mouvement dans une relation spatiale inconnue, utiliser un système d'imagerie pour acquérir une image du premier objet, déterminer une position et une orientation du premier objet dans une trame de référence de l'étage de commande de mouvement sur la base, au moins en partie, de l'image acquise du premier objet, utiliser le système d'imagerie pour acquérir une image du second objet, et déterminer une position et une orientation du second objet dans la trame de référence de l'étage de commande de mouvement sur la base, au moins en partie, de l'image acquise du second objet. Le procédé peut être utilisé dans l'enregistrement spatial de premier et second objets et, en particulier mais pas exclusivement, est destiné à être utilisé dans l'enregistrement spatial de composants optiques ou électroniques les uns par rapport aux autres, ou destiné à être utilisé dans l'alignement d'un premier objet tel qu'un composant optique ou électronique par rapport à un second objet tel qu'un élément, une structure, une zone cible ou une région cible définie sur un substrat ou une tranche.
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