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1. WO2022008518 - SENSING ELEMENT LEVEL CIRCUITRY DESIGN FOR ELECTRON COUNTING DETECTION DEVICE

Publication Number WO/2022/008518
Publication Date 13.01.2022
International Application No. PCT/EP2021/068676
International Filing Date 06.07.2021
IPC
G01N 23/2251 2018.1
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
23Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/-G01N17/178
22by measuring secondary emission from the material
225using electron or ion microprobes
2251using incident electron beams, e.g. scanning electron microscopy
H04N 5/32 2006.1
HELECTRICITY
04ELECTRIC COMMUNICATION TECHNIQUE
NPICTORIAL COMMUNICATION, e.g. TELEVISION
5Details of television systems
30Transforming light or analogous information into electric information
32Transforming X-rays
H01J 37/244 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02Details
244Detectors; Associated components or circuits therefor
G01T 1/24 2006.1
GPHYSICS
01MEASURING; TESTING
TMEASUREMENT OF NUCLEAR OR X-RADIATION
1Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
16Measuring radiation intensity
24with semiconductor detectors
Applicants
  • ASML NETHERLANDS B.V. [NL]/[NL]
Inventors
  • WANG, Yongxin
Agents
  • ASML NETHERLANDS B.V.
Priority Data
63/050,62810.07.2020US
63/113,17112.11.2020US
63/151,58519.02.2021US
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) SENSING ELEMENT LEVEL CIRCUITRY DESIGN FOR ELECTRON COUNTING DETECTION DEVICE
(FR) CONCEPTION DE CIRCUITERIE DE NIVEAU D'ÉLÉMENT DE DÉTECTION POUR DISPOSITIF DE DÉTECTION DE COMPTAGE D'ÉLECTRONS
Abstract
(EN) A charged particle beam detector may include a circuit with a storage cell configured to receive a signal representing an output of a sensing element; a storage cell multiplexer configured to selectively transmit the signal representing the output of the sensing element to the storage cell; a threshold detector configured to compare the signal representing the output of the sensing element to a threshold; and a converter configured to perform signal processing on a signal transmitted from the storage cell.
(FR) Un détecteur de faisceau de particules chargées peut comprendre un circuit, comportant une cellule de stockage conçue pour recevoir un signal représentant une sortie d'un élément de détection ; un multiplexeur de cellule de stockage, conçu pour transmettre sélectivement le signal représentant la sortie de l'élément de détection à la cellule de stockage ; un détecteur de seuil, conçu pour comparer le signal représentant la sortie de l'élément de détection à un seuil ; et un convertisseur, conçu pour effectuer un traitement de signal sur un signal transmis provenant de la cellule de stockage.
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