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1. WO2022008164 - HOLLOW-CORE FIBER BASED BROADBAND RADIATION GENERATOR WITH EXTENDED FIBER LIFETIME

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Publication Number WO/2022/008164
Publication Date 13.01.2022
International Application No. PCT/EP2021/065798
International Filing Date 11.06.2021
IPC
G02F 1/355 2006.1
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
35Non-linear optics
355characterised by the materials used
G02F 1/383 2006.1
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
35Non-linear optics
37for second-harmonic generation
377in an optical waveguide structure
383of the optical fibre type
CPC
G02B 2006/0325
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
6Light guides
02Optical fibre with cladding ; with or without a coating
032with non solid core or cladding
0325Fluid core or cladding
G02B 6/02304
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
6Light guides
02Optical fibre with cladding ; with or without a coating
02295Microstructured optical fibre
023having different index layers arranged around the core for guiding light by reflection, i.e. 1D crystal, e.g. omniguide
02304Core having lower refractive index than cladding, e.g. air filled, hollow core
G02B 6/032
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
6Light guides
02Optical fibre with cladding ; with or without a coating
032with non solid core or cladding
G02F 1/3528
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
35Non-linear optics
3528for producing a supercontinuum
G02F 1/355
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
35Non-linear optics
355characterised by the materials used
G02F 1/383
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
35Non-linear optics
37for second-harmonic generation
377in an optical waveguide structure
383of the optical fibre type
Applicants
  • ASML NETHERLANDS B.V. [NL]/[NL]
Inventors
  • ABDOLVAND, Amir
  • CRAUS, Cristian, Bogdan
  • EZERSKAIA, Anna
  • DOMALAPALLY, Phani Kumar
Agents
  • ASML NETHERLANDS B.V.
Priority Data
20184730.808.07.2020EP
21167961.813.04.2021EP
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) HOLLOW-CORE FIBER BASED BROADBAND RADIATION GENERATOR WITH EXTENDED FIBER LIFETIME
(FR) GÉNÉRATEUR DE RAYONNEMENT À LARGE BANDE À BASE DE FIBRES À ÂME CREUSE AYANT UNE DURÉE DE VIE DE FIBRE PROLONGÉE
Abstract
(EN) Disclosed is an optical component for a broadband light source device, the optical component being configured for generating a broadband output upon receiving pump radiation and comprising: a hollow-core photonic crystal fiber (HC-PCF); and a gas mixture filling said HC-PCF, wherein said gas mixture comprises a mixture of at least one first gas configured for the generation of the broadband radiation and at least one second gas comprising or consisting of Helium.
(FR) L'invention concerne un élément optique destiné à un dispositif de source de lumière à large bande, l'élément optique étant conçu pour générer une sortie à large bande lors de la réception d'un rayonnement de pompage et comprenant : une fibre de cristal photonique à âme creuse (HC-PCF) ; et un mélange gazeux remplissant ladite HC-PCF, ledit mélange gazeux comprenant un mélange d'au moins un premier gaz conçu pour générer le rayonnement à large bande et d'au moins un second gaz comprenant de l'hélium ou constitué d'hélium.
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