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1. WO2022008047 - SUBSTRATE HOLDER DEVICE, BONDING DEVICE AND METHOD FOR BONDING SUBSTRATES

Publication Number WO/2022/008047
Publication Date 13.01.2022
International Application No. PCT/EP2020/069242
International Filing Date 08.07.2020
IPC
H01L 21/683 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
683for supporting or gripping
F16K 11/076 2006.1
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16ENGINEERING ELEMENTS OR UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
11Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves; Arrangement of valves and flow lines specially adapted for mixing fluid
02with all movable sealing faces moving as one unit
06comprising only sliding valves
072with pivoted closure members
076with sealing faces shaped as surfaces of solids of revolution
F16K 11/085 2006.1
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16ENGINEERING ELEMENTS OR UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
11Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves; Arrangement of valves and flow lines specially adapted for mixing fluid
02with all movable sealing faces moving as one unit
08comprising only taps or cocks
085with cylindrical plug
F16K 3/26 2006.1
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16ENGINEERING ELEMENTS OR UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
3Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
22with sealing faces shaped as surfaces of solids of revolution
24with cylindrical valve members
26with fluid passages in the valve member
H01L 21/67 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
B23Q 3/08 2006.1
BPERFORMING OPERATIONS; TRANSPORTING
23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL, CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
3Devices holding, supporting, or positioning, work or tools, of a kind normally removable from the machine
02for mounting on a work-table, tool-slide, or analogous part
06Work-clamping means
08other than mechanically-actuated
Applicants
  • EV GROUP E. THALLNER GMBH [AT]/[AT]
Inventors
  • SÜSS, Jürgen Markus
  • MALLINGER, Jürgen
Agents
  • SCHNEIDER, Sascha
  • SCHWEIGER, Johannes
  • BERKENBRINK, Kai
  • FEUCKER, Max
Priority Data
Publication Language German (de)
Filing Language German (DE)
Designated States
Title
(DE) SUBSTRATHALTEVORRICHTUNG, BONDVORRICHTUNG UND VERFAHREN ZUM BONDEN VON SUBSTRATEN
(EN) SUBSTRATE HOLDER DEVICE, BONDING DEVICE AND METHOD FOR BONDING SUBSTRATES
(FR) DISPOSITIF DE SUPPORT DE SUBSTRAT, DISPOSITIF DE LIAISON ET PROCÉDÉ DE LIAISON DE SUBSTRATS
Abstract
(DE) Die Erfindung betrifft eine Substrathaltervorrichtung zumindest aufweisend mindestens ein Steuerventil und mindestens einen Substrathalter mit einer Substrathalteroberfläche und einer Substrathalterrückseite. Weiterhin betrifft die Erfindung eine Bondvorrichtung und ein Verfahren zum Bonden.
(EN) The invention relates to a substrate holder device at least comprising at least one control valve and at least one substrate holder having a substrate holder surface and a substrate holder back surface. The invention also relates to a bonding device and to a method for bonding.
(FR) L'invention concerne un dispositif de support de substrat comprenant au moins une soupape de commande et au moins un support de substrat présentant une surface de support de substrat et une surface arrière de support de substrat. L'invention concerne également un dispositif de liaison et un procédé de liaison.
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