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1. WO2022008033 - APPARATUS AND METHOD FOR PRODUCING MICRO- AND/OR NANO-STRUCTURES

Publication Number WO/2022/008033
Publication Date 13.01.2022
International Application No. PCT/EP2020/068998
International Filing Date 06.07.2020
IPC
G03F 7/00 2006.1
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
Applicants
  • EV GROUP E. THALLNER GMBH [AT]/[AT]
Inventors
  • DUDUS, Anna
  • TREIBLMAYR, Dominik
Agents
  • SCHNEIDER, Sascha
  • SCHWEIGER, Johannes
  • BERKENBRINK, Kai
  • FEUCKER, Max
Priority Data
Publication Language German (de)
Filing Language German (DE)
Designated States
Title
(DE) VERFAHREN UND VORRICHTUNG ZUM ERZEUGEN VON MIKRO- UND/ODER NANOSTRUKTUREN
(EN) APPARATUS AND METHOD FOR PRODUCING MICRO- AND/OR NANO-STRUCTURES
(FR) APPAREIL ET PROCÉDÉ DE PRODUCTION DE MICROSTRUCTURES ET/OU DE NANOSTRUCTURES
Abstract
(DE) Ein Verfahren und eine Vorrichtung zum Erzeugen von Mikro- und/oder Nanostrukturen.
(EN) An apparatus and a method for producing micro- and/or nano-structures.
(FR) L'invention concerne un appareil et un procédé de production de microstructures et/ou de nanostructures.
Latest bibliographic data on file with the International Bureau