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1. WO2022006313 - AUTOMATIC TEACH APPARATUS FOR ROBOTIC SYSTEMS AND METHOD THEREFOR

Publication Number WO/2022/006313
Publication Date 06.01.2022
International Application No. PCT/US2021/039958
International Filing Date 30.06.2021
IPC
G01B 11/02 2006.1
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
02for measuring length, width, or thickness
G03F 7/00 2006.1
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
G05B 19/18 2006.1
GPHYSICS
05CONTROLLING; REGULATING
BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
19Programme-control systems
02electric
18Numerical control (NC), i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
G06T 7/70 2017.1
GPHYSICS
06COMPUTING; CALCULATING OR COUNTING
TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
7Image analysis
70Determining position or orientation of objects or cameras
H01L 21/68 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
68for positioning, orientation or alignment
H01L 27/146 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
27Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
14including semiconductor components sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
144Devices controlled by radiation
146Imager structures
Applicants
  • BROOKS AUTOMATION, INC. [US]/[US]
Inventors
  • GRACIANO, Justo
  • HWANG, Helen
  • PASTOR, Erick
Agents
  • MARCOVICI, Janik
  • KNOTTS, William
Priority Data
17/362,56529.06.2021US
63/046,28930.06.2020US
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) AUTOMATIC TEACH APPARATUS FOR ROBOTIC SYSTEMS AND METHOD THEREFOR
(FR) APPAREIL D'APPRENTISSAGE AUTOMATIQUE POUR SYSTÈMES ROBOTIQUES ET PROCÉDÉ ASSOCIÉ
Abstract
(EN) An automatic teaching system for a substrate processing apparatus, the automatic teaching system comprising a frame having a workpiece load station with a predetermined load station reference location, a robot transport mounted to the frame and having a movable transport arm with an end effector having a predetermined end effector reference location, and a drive section driving the movable transport arm in at least one degree of freedom motion relative to the frame, a machine vision system including both at least one fixed imaging sensor and at least one movable imaging sensor removably connected to the frame and configured to image at least one target of the machine vision system, a load jig disposed for removable engagement with the workpiece load station, with both the at least one fixed imaging sensor and the at least one movable imaging sensor mounted to the load jig, the fixed imaging sensor.
(FR) L’invention concerne un système d'apprentissage automatique pour un appareil de traitement de substrat, le système d'apprentissage automatique comprenant un cadre présentant une station de charge de pièce à travailler comportant un emplacement de référence de station de charge prédéterminé, un robot de transport monté sur le cadre et présentant un bras de transport mobile avec un effecteur terminal comportant un emplacement de référence d'effecteur terminal prédéterminé, et une section d'entraînement entraînant le bras de transport mobile dans au moins un degré de liberté par rapport au cadre, un système de vision de machine comprenant à la fois au moins un capteur d'imagerie fixe et au moins un capteur d'imagerie mobile relié de façon amovible au cadre et configuré pour imager au moins une cible du système de vision artificielle, un gabarit de charge disposé pour un engagement amovible avec la station de charge de pièce à travailler, avec à la fois le au moins un capteur d'imagerie fixe et le au moins un capteur d'imagerie mobile montés sur le gabarit de charge.
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