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1. WO2022005036 - WAFER STORAGE CONTAINER

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Publication Number WO/2022/005036
Publication Date 06.01.2022
International Application No. PCT/KR2021/007148
International Filing Date 08.06.2021
IPC
H01L 21/673 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
673using specially adapted carriers
B65D 85/30 2006.1
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
DCONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
85Containers, packaging elements or packages, specially adapted for particular articles or materials
30for articles particularly sensitive to damage by shock or pressure
CPC
B65D 85/30
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
DCONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
85Containers, packaging elements or packages, specially adapted for particular articles or materials
30for articles particularly sensitive to damage by shock or pressure
H01L 21/673
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
673using specially adapted carriers ; or holders; Fixing the workpieces on such carriers or holders
H01L 21/67376
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
673using specially adapted carriers ; or holders; Fixing the workpieces on such carriers or holders
6735Closed carriers
67376characterised by sealing arrangements
H01L 21/67389
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
673using specially adapted carriers ; or holders; Fixing the workpieces on such carriers or holders
6735Closed carriers
67389characterised by atmosphere control
Applicants
  • 피코앤테라(주) PICO & TERA CO., LTD [KR]/[KR]
  • 우범제 WOO, Bum Je [KR]/[KR]
Inventors
  • 우범제 WOO, Bum Je
Agents
  • 최광석 CHOI, Kwang Seok
Priority Data
10-2020-008228003.07.2020KR
Publication Language Korean (ko)
Filing Language Korean (KO)
Designated States
Title
(EN) WAFER STORAGE CONTAINER
(FR) RÉCIPIENT DE STOCKAGE DE PLAQUETTES
(KO) 웨이퍼 수납용기
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Abstract
(EN) A wafer storage container according to an embodiment of the present invention comprises: a main body which includes an opening part at the front side thereof, and in which a wafer is accommodated; and an air current control part provided at one side of the main body, and the air current control part comprises a body the inside of which is empty; a compressed gas injection part provided at one side of the body and injecting a compressed gas into the body; and a compressed gas discharge part for discharging the compressed gas inside the body into the outside of the body, wherein the body extends by a predetermined length in a vertical or horizontal direction of the main body, and the main body includes a plurality of spray parts for spraying a purge gas into the inside thereof.
(FR) La présente invention concerne, selon un mode de réalisation, un récipient de stockage de plaquettes qui comprend : un corps principal qui comprend une partie d'ouverture sur son côté avant, et dans lequel une plaquette est reçue ; et une partie de commande de courant d'air disposée sur un côté du corps principal, et la partie de commande de courant d'air comprend un corps dont l'intérieur est vide ; une partie d'injection de gaz comprimé disposée sur un côté du corps et injectant un gaz comprimé dans le corps ; et une partie d'évacuation de gaz comprimé pour évacuer le gaz comprimé contenu à l'intérieur du corps vers l'extérieur du corps, le corps s'étendant d'une longueur prédéterminée dans une direction verticale ou horizontale du corps principal, et le corps principal comprenant une pluralité de parties de pulvérisation pour pulvériser un gaz de purge à l'intérieur de celui-ci.
(KO) 본 발명의 일 특징에 따른 웨이퍼 수납용기는 전방에 개구부를 포함하고, 웨이퍼가 수납되는 본체; 및 상기 본체의 일측에 구비되는 기류 제어부를 포함하되, 상기 기류 제어부는, 내부가 빈 형태로 제공되는 몸체; 상기 몸체의 일측에 제공되어 상기 몸체 내부에 압축가스를 주입하는 압축가스 주입부; 및 상기 몸체 내부의 압축가스를 상기 몸체 외부로 배출하는 압축가스 배출부를 포함하며, 상기 몸체는 상기 본체의 수직 방향 또는 수평 방향으로 소정 길이 연장된 형태로 제공되고, 상기 본체는 내부로 퍼지가스를 분사하는 복수개의 분사부를 포함하는 것을 특징으로 하는 웨이퍼 수납용기가 제공될 수 있다.
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