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1. WO2022004210 - WAFER SUPPORT DEVICE

Publication Number WO/2022/004210
Publication Date 06.01.2022
International Application No. PCT/JP2021/020201
International Filing Date 27.05.2021
IPC
H01L 21/683 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
683for supporting or gripping
Applicants
  • 住友大阪セメント株式会社 SUMITOMO OSAKA CEMENT CO., LTD. [JP]/[JP]
Inventors
  • 平山 昌樹 HIRAYAMA Masaki
  • 板垣 哲朗 ITAGAKI Tetsuro
Agents
  • 西澤 和純 NISHIZAWA Kazuyoshi
  • 佐藤 彰雄 SATO Akio
  • 萩原 綾夏 HAGIWARA Ayaka
Priority Data
2020-11180329.06.2020JP
Publication Language Japanese (ja)
Filing Language Japanese (JA)
Designated States
Title
(EN) WAFER SUPPORT DEVICE
(FR) DISPOSITIF DE SUPPORT DE TRANCHE
(JA) ウエハ支持装置
Abstract
(EN) This wafer support device is provided with a dielectric substrate and an RF electrode provided inside the dielectric substrate. The RF electrode is divided into a plurality of zone electrodes arrayed in the planar direction of the dielectric substrate. The wafer support device includes a short-circuit member connecting the plurality of zone electrodes, and a main-feeding rod connected to the short-circuit member from the back side of the dielectric substrate.
(FR) Ce dispositif de support de tranche est pourvu d'un substrat diélectrique et d'une électrode RF disposée à l'intérieur du substrat diélectrique. L'électrode RF est divisée en une pluralité d'électrodes de zone disposées en réseau dans la direction plane du substrat diélectrique. Le dispositif de support de tranche comprend un élément de court-circuit connectant la pluralité d'électrodes de zone, et une tige d'alimentation principale connectée à l'élément de court-circuit à partir du côté arrière du substrat diélectrique.
(JA) 誘電体基板と、誘電体基板の内部に設けられるRF電極と、を備えるウエハ支持装置。RF電極は、誘電体基板の平面方向に並ぶ複数のゾーン電極に分割されている。複数のゾーン電極同士を接続する短絡部材と、誘電体基板の裏面側から短絡部材に接続される主給電棒と、を有する。
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