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1. WO2022003916 - DEFECT INSPECTION DEVICE

Publication Number WO/2022/003916
Publication Date 06.01.2022
International Application No. PCT/JP2020/026071
International Filing Date 02.07.2020
IPC
G01B 11/30 2006.1
GPHYSICS
01MEASURING; TESTING
BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11Measuring arrangements characterised by the use of optical means
30for measuring roughness or irregularity of surfaces
G01N 21/88 2006.1
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
84Systems specially adapted for particular applications
88Investigating the presence of flaws, defects or contamination
G01N 29/04 2006.1
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
29Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
04Analysing solids
G01N 29/24 2006.1
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
29Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
22Details
24Probes
Applicants
  • 株式会社島津製作所 SHIMADZU CORPORATION [JP]/[JP]
Inventors
  • 堀川 浩司 HORIKAWA, Hiroshi
  • 田窪 健二 TAKUBO, Kenji
Agents
  • 宮園 博一 MIYAZONO, Hirokazu
Priority Data
Publication Language Japanese (ja)
Filing Language Japanese (JA)
Designated States
Title
(EN) DEFECT INSPECTION DEVICE
(FR) DISPOSITIF D'INSPECTION DE DÉFAUT
(JA) 欠陥検査装置
Abstract
(EN) This defect inspection device (100) comprises: an excitation unit (1); a laser illumination unit (2); an interference unit (30); an imaging unit (31); a holding member (4) that holds the imaging unit so that the imaging unit can be disposed at a position spaced a predetermined distance from an inspection target (90); a connection member (5) for connecting the holding member or the imaging unit with the excitation unit; and a control unit (6) that generates an image (61) pertaining to the propagation of an elastic wave on the inspection target.
(FR) Dispositif d'inspection de défaut (100) comprenant : une unité d'excitation (1); une unité d'éclairage laser (2); une unité d'interférence (30); une unité d'imagerie (31); un élément de maintien (4) qui maintient l'unité d'imagerie de telle sorte que l'unité d'imagerie puisse être disposée à une position espacée d'une distance prédéterminée d'une cible d'inspection (90); un élément de connexion (5) permettant de connecter l'élément de maintien ou l'unité d'imagerie à l'unité d'excitation; et une unité de commande (6) qui génère une image (61) se rapportant à la propagation d'une onde élastique sur la cible d'inspection.
(JA) この欠陥検査装置(100)は、励振部(1)と、レーザ照明(2)と、干渉部(30)と、撮像部(31)と、撮像部を検査対象(90)から所定の距離だけ離間した位置に配置可能に保持する保持部材(4)と、保持部材または撮像部と、励振部と、を接続する接続部材(5)と、検査対象の弾性波の伝播に関する画像(61)を生成する制御部(6)と、を備える。
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