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1. WO2022003270 - METHOD FOR MANUFACTURING A THERMO-OPTIC COMPONENT

Publication Number WO/2022/003270
Publication Date 06.01.2022
International Application No. PCT/FR2021/051128
International Filing Date 22.06.2021
IPC
G02F 1/01 2006.1
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
01for the control of the intensity, phase, polarisation or colour
G02F 1/015 2006.1
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
01for the control of the intensity, phase, polarisation or colour
015based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction
Applicants
  • SOITEC [FR]/[FR]
Inventors
  • SCIANCALEPORE, Corrado
  • GHYSELEN, Bruno
  • DELPY, Alain
  • CAILLER, Céline
  • HERISSON, David
  • ALAMI-IDRISSI, Aziz
Agents
  • BREESE, Pierre
Priority Data
FR200680129.06.2020FR
Publication Language French (fr)
Filing Language French (FR)
Designated States
Title
(EN) METHOD FOR MANUFACTURING A THERMO-OPTIC COMPONENT
(FR) PROCEDE DE FABRICATION D'UN COMPOSANT THERMO-OPTIQUE
Abstract
(EN) The invention relates to a method for manufacturing a thermo-optic component, comprising the following steps: a) providing an SOI substrate comprising: - a surface layer which is made of monocrystalline silicon and extends in a main plane and is arranged on a dielectric layer, which is itself arranged on a silicon carrier, and - at least one recessed cavity which is arranged in the carrier and which opens under the dielectric layer, b) forming an optical waveguide extending in the main plane and comprising a core which is formed in the surface layer and surrounded by an optical confinement layer which includes the dielectric layer, c) producing at least one heating element, on the optical waveguide, the heating element being positioned, in the main plane, vertically in line with a portion of the optical waveguide or on either side of the portion, the heating element and the portion of the optical waveguide being located vertically in line with the at least one recessed cavity.
(FR) L'invention concerne un procédé de fabrication d'un composant thermo-optique comprenant les étapes suivantes : a) la fourniture d'un substrat SOI comportant : - une couche superficielle en silicium monocristallin, s'étendant selon un plan principal et disposée sur une couche diélectrique, elle-même disposée sur un support en silicium, et - au moins une cavité enterrée, aménagée dans le support et débouchant sous la couche diélectrique, b) la formation d'un guide d'onde optique s'étendant dans le plan principal et comprenant un cœur formé dans la couche superficielle et entouré par une couche de confinement optique incluant la couche diélectrique, c) l'élaboration d'au moins un élément de chauffage, sur le guide d'onde optique, ledit élément de chauffage étant positionné, dans le plan principal, à l'aplomb d'une portion du guide d'onde optique, ou de part et d'autre de ladite portion, l'élément de chauffage et la portion du guide d'onde optique se trouvant à l'aplomb de la -au moins une- cavité enterrée.
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