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1. WO2022002937 - DEVICE AND METHOD FOR CONTROLLING FOCUS OF A LASER BEAM

Publication Number WO/2022/002937
Publication Date 06.01.2022
International Application No. PCT/EP2021/067850
International Filing Date 29.06.2021
IPC
G02F 1/33 2006.1
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
29for the control of the position or the direction of light beams, i.e. deflection
33Acousto-optical deflection devices
G03F 7/20 2006.1
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20Exposure; Apparatus therefor
CPC
G02F 1/33
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
29for the control of the position or the direction of light beams, i.e. deflection
33Acousto-optical deflection devices
G03F 7/70383
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR;
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
70Exposure apparatus for microlithography
70375Imaging systems not otherwise provided for, e.g. multiphoton lithography; Imaging systems comprising means for converting one type of radiation into another type of radiation, systems comprising mask with photo-cathode
70383Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
Applicants
  • MYCRONIC AB [SE]/[SE]
Inventors
  • STENSTRÖM, Pontus
  • SVENSSON, Anders
  • LARSON, John-Oscar
Agents
  • AWA SWEDEN AB
Priority Data
20183909.903.07.2020EP
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) DEVICE AND METHOD FOR CONTROLLING FOCUS OF A LASER BEAM
(FR) DISPOSITIF ET PROCÉDÉ DE COMMANDE DE LA MISE AU POINT D'UN FAISCEAU LASER
Abstract
(EN) A device, a computer program, a computer readable medium and a method for controlling focus of a laser beam during a micro sweep are disclosed. The laser beam is received to an acousto-optic deflector, and acoustic waves are provided to the acousto-optic deflector. The acoustic waves are varied in frequency over time to vary a deflection angle of the laser beam over time thereby achieving the micro sweep of the laser beam. Furthermore, a rate of variation in frequency of the acoustic waves is adapted over a time of the micro sweep in such a way that differences in frequencies over the time of the micro sweep of the acoustic waves are caused in the acousto-optic deflector over a width of the laser beam in a direction parallel to the micro sweep when passing through the acousto-optic deflector, where the differences in frequencies over the time of the micro sweep are such that they cause a desired focus of the laser beam in a direction parallel with the micro sweep over the micro sweep.
(FR) Un dispositif, un programme informatique, un support lisible par ordinateur et un procédé de commande de la mise au point d'un faisceau laser au cours d'un micro-balayage sont divulgués. Le faisceau laser est reçu vers un déflecteur acousto-optique, et des ondes acoustiques sont fournies au déflecteur acousto-optique. Les ondes acoustiques sont modifiées en fréquence dans le temps pour faire varier un angle de déviation du faisceau laser au cours du temps, ce qui permet d'obtenir le micro-balayage du faisceau laser. En outre, un taux de variation de fréquence des ondes acoustiques est adapté sur un temps du micro-balayage de telle sorte que des différences de fréquences sur le temps du micro-balayage des ondes acoustiques sont provoquées dans le déflecteur acousto-optique sur une largeur du faisceau laser dans une direction parallèle au micro-balayage lors du passage à travers le déflecteur acousto-optique, les différences de fréquences sur le temps du micro-balayage étant telles qu'elles provoquent une mise au point souhaitée du faisceau laser dans une direction parallèle au micro-balayage sur le micro-balayage.
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