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1. WO2022002345 - SUBSTRATE HOLDER AND METHOD FOR FIXING AND BONDING A SUBSTRATE

Publication Number WO/2022/002345
Publication Date 06.01.2022
International Application No. PCT/EP2020/068223
International Filing Date 29.06.2020
IPC
H01L 21/683 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
683for supporting or gripping
H01L 21/687 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
683for supporting or gripping
687using mechanical means, e.g. chucks, clamps or pinches
Applicants
  • EV GROUP E. THALLNER GMBH [AT]/[AT]
Inventors
  • PLACH, Thomas
Agents
  • SCHNEIDER, Sascha
  • SCHWEIGER, Johannes
  • BERKENBRINK, Kai
  • FEUCKER, Max
Priority Data
Publication Language German (de)
Filing Language German (DE)
Designated States
Title
(DE) SUBSTRATHALTER UND VERFAHREN ZUM FIXIEREN UND BONDEN EINES SUBSTRATS
(EN) SUBSTRATE HOLDER AND METHOD FOR FIXING AND BONDING A SUBSTRATE
(FR) SUPPORT DE SUBSTRAT ET PROCÉDÉ DE FIXATION ET DE COLLAGE D'UN SUBSTRAT
Abstract
(DE) Die vorliegende Erfindung betrifft einen Substrathalter (1, 1', 1'', 1''', 1'''', 1''''') zur Aufnahme eines Substrats (13), aufweisend Fixierelemente (6, 6', 6'') zur Fixierung des Substrats (13), wobei die Fixierelemente (6, 6', 6'') in Zonen (7, 7') gruppierbar sind, sowie ein korrespondierendes Verfahren.
(EN) The present invention relates to a substrate holder (1, 1', 1'', 1''', 1'''', 1''''') for receiving a substrate (13), said substrate holder comprising fixing elements (6, 6', 6'') for fixing the substrate (13), wherein the fixing elements (6, 6', 6'') can be grouped into zones (7, 7'). The invention also relates to a corresponding method.
(FR) La présente invention concerne un support de substrat (1, 1', 1'', 1'', 1'''', 1'''''') pour recevoir un substrat (13), ledit support de substrat comprenant des éléments de fixation (6 6', 6'') pour fixer le substrat (13), les éléments de fixation (6, 6', 6'') pouvant être regroupés en zones (7, 7'). L'invention concerne également un procédé correspondant.
Latest bibliographic data on file with the International Bureau