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1. WO2022002169 - THERMAL-PILE SENSOR AND METHOD FOR MANUFACTURING SAME, AND ELECTRONIC DEVICE

Publication Number WO/2022/002169
Publication Date 06.01.2022
International Application No. PCT/CN2021/103821
International Filing Date 30.06.2021
IPC
H01L 35/34 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
35Thermoelectric devices comprising a junction of dissimilar materials, i.e. exhibiting Seebeck or Peltier effect with or without other thermoelectric effects or thermomagnetic effects; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
34Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
H01L 35/32 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
35Thermoelectric devices comprising a junction of dissimilar materials, i.e. exhibiting Seebeck or Peltier effect with or without other thermoelectric effects or thermomagnetic effects; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
28operating with Peltier or Seebeck effect only
32characterised by the structure or configuration of the cell or thermo-couple forming the device
G01J 5/10 2006.1
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
5Radiation pyrometry
10using electric radiation detectors
Applicants
  • 中芯集成电路(宁波)有限公司上海分公司 NINGBO SEMICONDUCTOR INTERNATIONAL CORPORATION (SHANGHAI BRANCH) [CN]/[CN]
Inventors
  • 黄河 HUANG, Herb He
Agents
  • 上海知锦知识产权代理事务所(特殊普通合伙) INTEBRIGHT LLP
Priority Data
202010615245.030.06.2020CN
202010615259.230.06.2020CN
202010615278.530.06.2020CN
202010615286.X30.06.2020CN
202010615288.930.06.2020CN
202010615291.030.06.2020CN
202010615301.030.06.2020CN
202010615313.330.06.2020CN
202010617243.530.06.2020CN
202010617264.730.06.2020CN
202010617265.130.06.2020CN
202010617271.730.06.2020CN
202010617274.030.06.2020CN
202010617292.930.06.2020CN
202010622619.130.06.2020CN
202010622625.730.06.2020CN
Publication Language Chinese (zh)
Filing Language Chinese (ZH)
Designated States
Title
(EN) THERMAL-PILE SENSOR AND METHOD FOR MANUFACTURING SAME, AND ELECTRONIC DEVICE
(FR) CAPTEUR À PILE THERMIQUE ET SON PROCÉDÉ DE FABRICATION, ET DISPOSITIF ÉLECTRONIQUE
(ZH) 热电堆传感器及其制作方法、电子设备
Abstract
(EN) Provided are a thermal-pile sensor and a method for manufacturing same, and an electronic device. The thermal-pile sensor comprises: a thermal-pile structure plate, a supporting layer and a substrate, which are successively arranged in an incident radiation direction, wherein the thermal-pile structure plate is provided with a thermal radiation sensing area; a thermal-pile structure is formed in the thermal radiation sensing area; a first cavity is enclosed by the substrate, the thermal-pile structure plate and the supporting layer; and the thermal-pile structure is arranged above the first cavity, so as to facilitate the miniaturization of the thermal-pile sensor, thereby improving the measurement accuracy of the thermal-pile sensor.
(FR) La présente invention concerne un capteur à pile thermique et son procédé de fabrication, et un dispositif électronique. Le capteur à pile thermique comprend : une plaque de structure de pile thermique, une couche de support et un substrat, qui sont disposés successivement dans une direction de rayonnement incident, la plaque de structure de pile thermique étant pourvue d'une zone de détection de rayonnement thermique; une structure de pile thermique étant formée dans la zone de détection de rayonnement thermique; une première cavité étant entourée par le substrat, la plaque de structure de pile thermique et la couche de support; et la structure de pile thermique étant disposée au-dessus de la première cavité, de manière à faciliter la miniaturisation du capteur à pile thermique, ce qui permet d'améliorer la précision de mesure du capteur à pile thermique.
(ZH) 本发明提供一种热电堆传感器及其制作方法、电子设备,热电堆传感器包括沿入射辐射方向依次设置的:热电堆结构板,所述热电堆结构板具有热辐射感应区,所述热辐射感应区中形成有热电堆结构;支撑层;基板,所述基板、所述热电堆结构板、和所述支撑层之间围成有第一空腔,且所述热电堆结构设置在所述第一空腔的上方,有利于热电堆传感器的微型化,从而能提高热电堆传感器的测量精度。
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