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1. WO2022001390 - PIEZOELECTRIC SENSOR AND MANUFACTURING METHOD THEREFOR, AND DETECTION APPARATUS

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Publication Number WO/2022/001390
Publication Date 06.01.2022
International Application No. PCT/CN2021/093318
International Filing Date 12.05.2021
IPC
H01L 41/08 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
08Piezo-electric or electrostrictive elements
H01L 41/113 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
08Piezo-electric or electrostrictive elements
113with mechanical input and electrical output
H01L 41/22 2013.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
22Processes or apparatus specially adapted for the assembly, manufacture or treatment of piezo-electric or electrostrictive devices or of parts thereof
H01L 41/29 2013.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
22Processes or apparatus specially adapted for the assembly, manufacture or treatment of piezo-electric or electrostrictive devices or of parts thereof
29Forming electrodes, leads or terminal arrangements
G01D 5/14 2006.1
GPHYSICS
01MEASURING; TESTING
DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED BY A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; TRANSFERRING OR TRANSDUCING ARRANGEMENTS NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
5Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
12using electric or magnetic means
14influencing the magnitude of a current or voltage
CPC
G01D 5/14
GPHYSICS
01MEASURING; TESTING
DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
5Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
12using electric or magnetic means
14influencing the magnitude of a current or voltage
H01L 41/0805
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
08Piezo-electric or electrostrictive devices
0805based on piezo-electric or electrostrictive films or coatings
H01L 41/1132
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
08Piezo-electric or electrostrictive devices
113with mechanical input and electrical output ; , e.g. generators, sensors
1132Sensors
H01L 41/1138
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
08Piezo-electric or electrostrictive devices
113with mechanical input and electrical output ; , e.g. generators, sensors
1138Membrane type
H01L 41/22
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
22Processes or apparatus specially adapted for the assembly, manufacture or treatment of piezo-electric or electrostrictive devices or of parts thereof
H01L 41/29
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
22Processes or apparatus specially adapted for the assembly, manufacture or treatment of piezo-electric or electrostrictive devices or of parts thereof
29Forming electrodes, leads or terminal arrangements
Applicants
  • 京东方科技集团股份有限公司 BOE TECHNOLOGY GROUP CO., LTD. [CN]/[CN]
Inventors
  • 牛菁 NIU, Jing
  • 周婷婷 ZHOU, Tingting
  • 张方振 ZHANG, Fangzhen
  • 彭锦涛 PENG, Jintao
Agents
  • 中国贸促会专利商标事务所有限公司 CCPIT PATENT AND TRADEMARK LAW OFFICE
Priority Data
202010603068.429.06.2020CN
Publication Language Chinese (zh)
Filing Language Chinese (ZH)
Designated States
Title
(EN) PIEZOELECTRIC SENSOR AND MANUFACTURING METHOD THEREFOR, AND DETECTION APPARATUS
(FR) CAPTEUR PIÉZOÉLECTRIQUE ET SON PROCÉDÉ DE FABRICATION, ET APPAREIL DE DÉTECTION
(ZH) 压电传感器及其制造方法、检测装置
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Abstract
(EN) A piezoelectric sensor and a manufacturing method therefor, and a detection apparatus, which relate to the technical field of sensing. The piezoelectric sensor comprises: an array substrate (101); a first cover layer (102) located on the array substrate (101), the first cover layer (102) comprising a first portion (1021) and a second portion (1022), wherein the first portion (1021) covers the array substrate (101), and a cavity (106) and a first opening (1023) are provided between the second portion (1022) and the array substrate (101); a first electrode (103) located above the first cover layer (102) and above the cavity (106); a piezoelectric film (104) located on the first electrode (103); and a second electrode (105) located on the piezoelectric film (104).
(FR) L'invention se rapporte au domaine technique de détection, et concerne un capteur piézoélectrique et son procédé de fabrication, et un appareil de détection. Le capteur piézoélectrique comprend : un substrat de réseau (101) ; une première couche de recouvrement (102) située sur le substrat de réseau (101), la première couche de recouvrement (102) comprenant une première partie (1021) et une seconde partie (1022), la première partie (1021) recouvre le substrat de réseau (101), et une cavité (106) et une première ouverture (1023) sont disposées entre la seconde partie (1022) et le substrat de réseau (101) ; une première électrode (103) située au-dessus de la première couche de recouvrement (102) et au-dessus de la cavité (106) ; un film piézoélectrique (104) situé sur la première électrode (103) ; et une seconde électrode (105) située sur le film piézoélectrique (104).
(ZH) 一种压电传感器及其制造方法、检测装置，涉及传感技术领域。所述压电传感器包括：阵列基板（101）；第一盖层（102），位于所述阵列基板（101）上，所述第一盖层（102）包括第一部分（1021）和第二部分（1022），其中所述第一部分（1021）覆盖所述阵列基板（101），所述第二部分（1022）与所述阵列基板（101）之间具有空腔（106）且具有第一开口（1023）；第一电极（103），位于所述第一盖层（102）的上方，且位于所述空腔（106）的上方；压电薄膜（104），位于所述第一电极（103）上；以及第二电极（105），位于所述压电薄膜（104）上。
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