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1. WO2021236492 - REAL-TIME ISOLATION OF SELF-TEST AND LINEAR ACCELERATION SIGNALS

Publication Number WO/2021/236492
Publication Date 25.11.2021
International Application No. PCT/US2021/032704
International Filing Date 17.05.2021
IPC
G01P 21/00 2006.1
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK; INDICATING PRESENCE OR ABSENCE OF MOVEMENT;  INDICATING DIRECTION OF MOVEMENT 
21Testing or calibrating of apparatus or devices covered by the other groups of this subclass
B81B 7/00 2006.1
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
7Microstructural systems
B81C 99/00 2010.1
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
99Subject matter not provided for in other groups of this subclass
G01P 15/125 2006.1
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK; INDICATING PRESENCE OR ABSENCE OF MOVEMENT;  INDICATING DIRECTION OF MOVEMENT 
15Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02by making use of inertia forces
08with conversion into electric or magnetic values
125by capacitive pick-up
G01P 15/08 2006.1
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK; INDICATING PRESENCE OR ABSENCE OF MOVEMENT;  INDICATING DIRECTION OF MOVEMENT 
15Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02by making use of inertia forces
08with conversion into electric or magnetic values
CPC
B81B 2201/0235
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
2201Specific applications of microelectromechanical systems
02Sensors
0228Inertial sensors
0235Accelerometers
B81B 2207/03
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
2207Microstructural systems or auxiliary parts thereof
03Electronic circuits for micromechanical devices which are not application specific, e.g. for controlling, power supplying, testing, protecting
B81C 99/0045
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
99Subject matter not provided for in other groups of this subclass
0035Testing
0045End test of the packaged device
G01P 15/125
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
15Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02by making use of inertia forces ; using solid seismic masses
08with conversion into electric or magnetic values
125by capacitive pick-up
G01P 2015/0831
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
15Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02by making use of inertia forces ; using solid seismic masses
08with conversion into electric or magnetic values
0805being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
0822for defining out-of-plane movement of the mass
0825for one single degree of freedom of movement of the mass
0831the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
G01P 2015/0868
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
15Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02by making use of inertia forces ; using solid seismic masses
08with conversion into electric or magnetic values
0862being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
0868using self-test structures integrated into the microstructure
Applicants
  • INVENSENSE, INC. [US]/[US]
Inventors
  • HUGHES, Kevin
  • LAGHI, Giacomo
  • AVANTAGGIATI, Vito
Agents
  • VAN HOVEN, Joshua
  • OSTERBUR, Stefan
Priority Data
16/881,73222.05.2020US
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) REAL-TIME ISOLATION OF SELF-TEST AND LINEAR ACCELERATION SIGNALS
(FR) ISOLATION EN TEMPS RÉEL DE SIGNAUX D'AUTO-TEST ET D'ACCÉLÉRATION LINÉAIRE
Abstract
(EN) A MEMS accelerometer includes proof masses that move in-phase in response to a sensed linear acceleration. Self-test drive circuitry imparts an out-of-phase movement onto the proof masses. The motion of the proof masses in response to the linear acceleration and the self-test movement is sensed as a sense signal on common sense electrodes. Processing circuitry extracts from a linear acceleration signal corresponding to the in-phase movement due to linear acceleration and a self-test signal corresponding to the out-of-phase movement due to the self-test drive signal.
(FR) L'invention concerne un accéléromètre MEMS comprenant des masses d'épreuve qui se déplacent en phase en réponse à une accélération linéaire détectée. Un circuit d'attaque d'auto-test imprime un déplacement hors phase sur les masses d'épreuve. Le déplacement des masses d'épreuve en réponse à l'accélération linéaire et au déplacement d'auto-test est détecté en tant que signal de détection sur des électrodes de détection communes. Un circuit de traitement extrait un signal d'accélération linéaire correspondant au déplacement en phase dû à une accélération linéaire et un signal d'auto-test correspondant au déplacement hors phase dû au signal d'attaque d'auto-test.
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