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1. WO2021216162 - SNSPD WITH INTEGRATED ALUMINUM NITRIDE SEED OR WAVEGUIDE LAYER

Publication Number WO/2021/216162
Publication Date 28.10.2021
International Application No. PCT/US2021/015798
International Filing Date 29.01.2021
IPC
G01J 1/44 2006.1
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
1Photometry, e.g. photographic exposure meter
42using electric radiation detectors
44Electric circuits
G01J 1/02 2006.1
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
1Photometry, e.g. photographic exposure meter
02Details
H01B 12/06 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
12Superconductive or hyperconductive conductors, cables or transmission lines
02characterised by their form
06Films or wires on bases or cores
CPC
G01J 1/0407
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
1Photometry, e.g. photographic exposure meter
02Details
04Optical or mechanical part ; supplementary adjustable parts
0407Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
G01J 1/0437
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
1Photometry, e.g. photographic exposure meter
02Details
04Optical or mechanical part ; supplementary adjustable parts
0407Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
0437using masks, aperture plates, spatial light modulators, spatial filters, e.g. reflective filters
G01J 1/42
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
1Photometry, e.g. photographic exposure meter
42using electric radiation detectors
G01J 2001/0496
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
1Photometry, e.g. photographic exposure meter
02Details
04Optical or mechanical part ; supplementary adjustable parts
0488with spectral filtering
0496using fiber Bragg gratings
G01J 2001/442
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
1Photometry, e.g. photographic exposure meter
42using electric radiation detectors
44Electric circuits
4413Type
442Single-photon detection or photon counting
H01L 39/10
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
39Devices using superconductivity; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof
02Details
10characterised by the means for switching ; between superconductive and normal states
Applicants
  • APPLIED MATERIALS, INC. [US]/[US]
Inventors
  • YANG, Zihao
  • ZHU, Mingwei
  • PATIBANDLA, Nag B.
  • YAHAV, Nir
  • VISSER, Robert Jan
  • DE LA ZERDA, Adi
Agents
  • GOREN, David J.
Priority Data
62/969,61103.02.2020US
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) SNSPD WITH INTEGRATED ALUMINUM NITRIDE SEED OR WAVEGUIDE LAYER
(FR) SNSPD À COUCHE DE GUIDE D'ONDES OU DE GERMES EN NITRURE D'ALUMINIUM INTÉGRÉE
Abstract
(EN) A superconducting nanowire single photon detector (SNSPD) device includes a substrate, a distributed Bragg reflector on the substrate, a seed layer of a metal nitride on the distributed Bragg reflector, and a superconductive wire on the seed layer. The distributed Bragg reflector includes a plurality of bi-layers, each bilayer including lower layer of a first material and an upper layer of a second material having a higher index of refraction than the first material. The wire is a metal nitride different from the metal nitride of the seed material.
(FR) La présente invention concerne un détecteur de photon unique à nanofil supraconducteur (SNSPD) incluant un substrat, un réflecteur de Bragg distribué sur le substrat, une couche de germe d'un nitrure métallique sur le réflecteur de Bragg distribué, et un fil supraconducteur sur la couche de germe. Le réflecteur de Bragg distribué inclut une pluralité de bicouches, chaque bicouche incluant une couche inférieure d'un premier matériau et une couche supérieure d'un second matériau ayant un indice de réfraction supérieur à celui du premier matériau. Le fil est fait d'un nitrure métallique différent du nitrure métallique du matériau de germe.
Latest bibliographic data on file with the International Bureau