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1. WO2021146332 - CALCITE CHANNEL STRUCTURES WITH HETEROGENEOUS WETTABILITY

Publication Number WO/2021/146332
Publication Date 22.07.2021
International Application No. PCT/US2021/013298
International Filing Date 13.01.2021
IPC
G03F 1/80 2012.1
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
1Originals for photomechanical production of textured or patterned surfaces, e.g. masks, photo-masks or reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
68Preparation processes not covered by groups G03F1/20-G03F1/5096
80Etching
B81C 1/00 2006.1
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
1Manufacture or treatment of devices or systems in or on a substrate
E21B 49/00 2006.1
EFIXED CONSTRUCTIONS
21EARTH OR ROCK DRILLING; MINING
BEARTH OR ROCK DRILLING; OBTAINING OIL, GAS, WATER, SOLUBLE OR MELTABLE MATERIALS OR A SLURRY OF MINERALS FROM WELLS
49Testing the nature of borehole walls; Formation testing; Methods or apparatus for obtaining samples of soil or well fluids, specially adapted to earth drilling or wells
G03F 7/00 2006.1
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
CPC
B33Y 10/00
BPERFORMING OPERATIONS; TRANSPORTING
33ADDITIVE MANUFACTURING TECHNOLOGY
YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
10Processes of additive manufacturing
B81B 1/00
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
1Devices without movable or flexible elements, e.g. microcapillary devices
B81B 2201/058
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
2201Specific applications of microelectromechanical systems
05Microfluidics
058Microfluidics not provided for in B81B2201/051 - B81B2201/054
B81B 2203/0338
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
2203Basic microelectromechanical structures
03Static structures
0323Grooves
0338Channels
B81C 1/00531
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
1Manufacture or treatment of devices or systems in or on a substrate
00436Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
00523Etching material
00531Dry etching
B81C 2201/0132
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
2201Manufacture or treatment of microstructural devices or systems
01in or on a substrate
0101Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
0128Processes for removing material
013Etching
0132Dry etching, i.e. plasma etching, barrel etching, reactive ion etching [RIE], sputter etching or ion milling
Applicants
  • SAUDI ARABIAN OIL COMPANY [SA]/[SA]
  • ARAMCO SERVICES COMPANY [US]/[US] (AG)
Inventors
  • CHA, Dong Kyu
  • GMIRA, Ahmed
  • ALOTAIBI, Mohammed Badri
  • AL-YOUSEF, Ali Abdallah
Agents
  • BRUCE, Carl E.
  • IYER, Sushil
  • COX, Michael E.
  • DEAN, Sean M.
  • WERNLI, Matthew K.
Priority Data
16/742,64414.01.2020US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) CALCITE CHANNEL STRUCTURES WITH HETEROGENEOUS WETTABILITY
(FR) STRUCTURES DE CANAUX DE CALCITE À MOUILLABILITÉ HÉTÉROGÈNE
Abstract
(EN)
A method of making a portion of a microfluidic channel includes lithographically patterning a first pattern (100) into a first layer of photoresist (112) disposed on a substrate (110), the first pattern representative of morphology of a reservoir rock; etching the first pattern into the substrate to form a patterned substrate (118); disposing a second layer of photoresist (120) onto the patterned substrate; lithographically patterning a second pattern (123) into the second layer of photoresist to reveal portions of the patterned substrate; and depositing calcite (132) onto the exposed portions of the patterned substrate; and corresponding microfluidic device (300).
(FR)
La présente invention concerne un procédé de fabrication d'une partie d'un canal microfluidique qui comprend la formation lithographique d'un premier motif (100) dans une première couche de résine photosensible (112) disposée sur un substrat (110), le premier motif représentant la morphologie d'une roche de réservoir ; la gravure du premier motif dans le substrat pour former un substrat à motifs (118) ; la disposition d'une seconde couche de résine photosensible (120) sur le substrat à motifs ; la formation lithographique d'un second motif (123) dans la seconde couche de résine photosensible pour révéler des parties du substrat à motifs ; et le dépôt de calcite (132) sur les parties exposées du substrat à motifs ; et un dispositif microfluidique correspondant (300).
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