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1. WO2021066412 - METHOD FOR MEASURING CONCENTRATION OF ADDITIVE BREAKDOWN PRODUCTS INCLUDED IN PLATING SOLUTION

Publication Number WO/2021/066412
Publication Date 08.04.2021
International Application No. PCT/KR2020/013100
International Filing Date 25.09.2020
IPC
G01N 27/30 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
27Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
26by investigating electrochemical variables; by using electrolysis or electrophoresis
28Electrolytic cell components
30Electrodes, e.g. test electrodes; Half-cells
G01N 27/333 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
27Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
26by investigating electrochemical variables; by using electrolysis or electrophoresis
28Electrolytic cell components
30Electrodes, e.g. test electrodes; Half-cells
333Ion-selective electrodes or membranes
G01N 27/404 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
27Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
26by investigating electrochemical variables; by using electrolysis or electrophoresis
403Cells and electrode assemblies
404Cells with anode, cathode and cell electrolyte on the same side of a permeable membrane which separates them from the sample fluid
G01N 27/416 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
27Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
26by investigating electrochemical variables; by using electrolysis or electrophoresis
416Systems
C25D 3/38 2006.01
CCHEMISTRY; METALLURGY
25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; JOINING WORKPIECES BY ELECTROLYSIS; APPARATUS THEREFOR
3Electroplating; Baths therefor
02from solutions
38of copper
Applicants
  • 한국재료연구원 KOREA INSTITUTE OF MATERIALS SCIENCE [KR]/[KR]
Inventors
  • 최승희 CHOE, Seung-hoe
  • 한명진 HAN, Myeongjin
  • 김만 KIM, Man
  • 유병욱 YOO, Bung-uk
  • 이규환 LEE, Kyu-hwan
  • 이주열 LEE, Joo-yul
  • 권영환 KWAN, Younghwon
Agents
  • 특허법인 이지 EZ INTERNATIONAL PATENT TRADEMARK LAW OFFICE
Priority Data
10-2019-012099230.09.2019KR
10-2020-008490409.07.2020KR
Publication Language Korean (KO)
Filing Language Korean (KO)
Designated States
Title
(EN) METHOD FOR MEASURING CONCENTRATION OF ADDITIVE BREAKDOWN PRODUCTS INCLUDED IN PLATING SOLUTION
(FR) PROCÉDÉ DE MESURE DE LA CONCENTRATION DE PRODUITS DE DÉCOMPOSITION D'ADDITIF PRÉSENTS DANS UNE SOLUTION DE PLACAGE
(KO) 도금액에 포함된 첨가제 분해 산물 농도 측정방법{MEASURING METHOD FOR CONCENTRATION OF ADDITIVE BREAKDOWN PRODUCT IN PLATING SOLUTION}
Abstract
(EN)
The present invention relates to a measurement method which can directly and continuously measure the concentration of monovalent copper ions (Cu+), 3-mercaptopropyl sulfonate (MPS), or Cu+-MPS, which are breakdown products of a plating additive included in a plating solution, during a plating process, and also relates to an electrochemical measurement cell, and a measurement device.
(FR)
La présente invention se rapporte à un procédé de mesure qui peut mesurer directement et en continu la concentration d'ions cuivre monovalents (Cu+), 3-mercaptopropyl sulfonate (MPS), ou Cu+-MPS, qui sont des produits de la dégradation d'un additif de placage présents dans une solution de placage, pendant un processus de placage, et se rapporte également à une cellule de mesure électrochimique et à un dispositif de mesure.
(KO)
본 발명은 도금공정 중 도금액에 포함된 도금 첨가제의 분해 산물인 일가 구리이온(Cu+), 3-머캡토프로필 설포네이트(3-mercaptopropyl sulfonate, MPS), 또는 Cu+-MPS의 농도를 직접적으로 연속하여 측정할 수 있는 측정방법, 전기화학적 측정 셀, 및 측정 장치에 관한 것이다.
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