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1. WO2021058720 - A PLASMA DEVICE AND A METHOD FOR GENERATING A PLASMA

Publication Number WO/2021/058720
Publication Date 01.04.2021
International Application No. PCT/EP2020/076861
International Filing Date 25.09.2020
IPC
H05H 1/24 2006.01
HELECTRICITY
05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY- CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
1Generating plasma; Handling plasma
24Generating plasma
H05H 1/48 2006.01
HELECTRICITY
05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY- CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
1Generating plasma; Handling plasma
24Generating plasma
48using an arc
H01J 37/32 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes
B23Q 1/44 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL, CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
1Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
25Movable or adjustable work or tool supports
44using particular mechanisms
B23Q 1/70 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL, CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
1Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
70Stationary or movable members for carrying working-spindles for attachment of tools or work
CPC
H01J 37/32348
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
32348Dielectric barrier discharge
H01J 37/32568
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
32431Constructional details of the reactor
32532Electrodes
32568Relative arrangement or disposition of electrodes; moving means
H01J 37/32733
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
32431Constructional details of the reactor
32733Means for moving the material to be treated
H01J 37/32752
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
32431Constructional details of the reactor
32733Means for moving the material to be treated
32752for moving the material across the discharge
H05H 1/2431
H05H 1/473
Applicants
  • UNIVERZA V LJUBLJANI [SI]/[SI]
  • JOŽEF STEFAN INSTITUTE [SI]/[SI]
  • CERTOTTICA SCRL [IT]/[IT]
Inventors
  • DAHLE, Sebastian
  • ŽIGON, Jure
  • PETRIC, Marko
  • KOVAC, Janez
  • DA CORTÀ, Giuseppe
Agents
  • ZACCO GMBH
Priority Data
LU10142027.09.2019LU
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) A PLASMA DEVICE AND A METHOD FOR GENERATING A PLASMA
(FR) DISPOSITIF À PLASMA ET PROCÉDÉ DE GÉNÉRATION D'UN PLASMA
Abstract
(EN)
A plasma device (10) comprises a mounting support (11), at least one first lever (12) rotatably mounted on the mounting support (11), at least one second lever (13) rotatably mounted on the at least one first lever (12), and a first electrode (14) attached to the at least one second lever (13).
(FR)
Un dispositif à plasma (10) comprend un support de montage (11), au moins un premier levier (12) monté rotatif sur le support de montage (11), au moins un second levier (13) monté rotatif sur ledit au moins un premier levier (12), et une première électrode (14) fixée audit second levier (13).
Latest bibliographic data on file with the International Bureau