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1. WO2021056855 - MO-DOPED ALCRSIN/MO SELF-LUBRICATING FILM AND PREPARATION METHOD THEREFOR

Publication Number WO/2021/056855
Publication Date 01.04.2021
International Application No. PCT/CN2019/125596
International Filing Date 16.12.2019
IPC
C23C 14/06 2006.01
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06characterised by the coating material
C23C 14/35 2006.01
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
34Sputtering
35by application of a magnetic field, e.g. magnetron sputtering
C23C 14/02 2006.01
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
02Pretreatment of the material to be coated
CPC
C23C 14/0036
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
0021Reactive sputtering or evaporation
0036Reactive sputtering
C23C 14/024
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
02Pretreatment of the material to be coated
024Deposition of sublayers, e.g. to promote adhesion of the coating
C23C 14/0641
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06characterised by the coating material
0641Nitrides
C23C 14/352
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
34Sputtering
35by application of a magnetic field, e.g. magnetron sputtering
352using more than one target
Applicants
  • 天津职业技术师范大学(中国职业培训指导教师进修中心) TIANJIN UNIVERSITY OF TECHNOLOGY AND EDUCATION (TEACHER DEVELOPMENT CENTER OF CHINA VOCATIONAL TRAINING AND GUIDANCE) [CN]/[CN]
Inventors
  • 王铁钢 WANG, Tiegang
  • 蒙德强 MENG, Deqiang
  • 刘艳梅 LIU, Yanmei
  • 阎兵 YAN, Bing
  • 许人仁 XU, Renren
  • 尹照星 YIN, Zhaoxing
Agents
  • 沈阳科苑专利商标代理有限公司 SHENYANG PATENT & TRADEMARK AGENCY ACADEMIA SINICA
Priority Data
201910897038.623.09.2019CN
Publication Language Chinese (ZH)
Filing Language Chinese (ZH)
Designated States
Title
(EN) MO-DOPED ALCRSIN/MO SELF-LUBRICATING FILM AND PREPARATION METHOD THEREFOR
(FR) FILM AUTO-LUBRIFIANT À BASE D'ALCRSIN/MO DOPÉ AU MO ET SON PROCÉDÉ DE PRÉPARATION
(ZH) 一种Mo掺杂型AlCrSiN/Mo自润滑薄膜及其制备方法
Abstract
(EN)
A Mo-doped AlCrSiN/Mo self-lubricating film and a preparation method therefor, relating to the technical field of films and preparation thereof. The AlCrSiN/Mo self-lubricating film is prepared by doping Mo element into an AlCrSiN film, the doping amount of Mo element being 0.3-6.3 at.%. The AlCrSiN/Mo self-lubricating film is prepared on a base body by high power impulse magnetron sputtering and pulsed direct current magnetron sputtering composite coating technology. The prepared AlCrSiN/Mo self-lubricating film has high hardness, good toughness, and excellent anti-friction properties, can significantly reduce the tool-chip friction, and has good chemical stability and easy-to-shear lubrication properties.
(FR)
L'invention concerne un film auto-lubrifiant à base d'AlCrSiN/Mo dopé au Mo et son procédé de préparation, se rapportant au domaine technique des films et de leur préparation. Le film autolubrifiant à base d'AlCrSiN/Mo est préparé par dopage de l'élément Mo dans un film à base d'AlCrSiN, la proportion de dopage de l'élément Mo étant de 0,3 à 6,3 % atomique. Le film autolubrifiant à base d'AlCrSiN/Mo est préparé sur un corps de base par une pulvérisation magnétron à impulsions haute puissance et une technologie de revêtement composite par une pulvérisation magnétron à courant continu pulsé. Le film autolubrifiant à base d'AlCrSiN/Mo préparé présente une dureté élevée, une bonne ténacité et d'excellentes propriétés anti-frottement, peut réduire de manière significative le frottement outil-copeau, et présente de bonnes propriétés de stabilité chimique et de lubrification avec facilité de cisaillement.
(ZH)
一种Mo掺杂型AlCrSiN/Mo自润滑薄膜及其制备方法,属于薄膜及其制备技术领域。所述AlCrSiN/Mo自润滑薄膜是将Mo元素掺杂进AlCrSiN薄膜中制备而成,Mo元素的掺杂量为0.3~6.3at.%,该薄膜采用高功率脉冲磁控溅射和脉冲直流磁控溅射复合镀膜技术在基体上制备而成。所制备的AlCrSiN/Mo自润滑薄膜硬度高、韧性好,具备优良的减摩特性,可以显著降低刀-屑间的摩擦,具有较好的化学稳定性及易剪切的润滑特性。
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