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1. WO2021044353 - REDUCING PLASMA FORMATION IN AN ION PUMP

Publication Number WO/2021/044353
Publication Date 11.03.2021
International Application No. PCT/IB2020/058239
International Filing Date 04.09.2020
Chapter 2 Demand Filed 06.04.2021
IPC
H01J 41/12 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
41Discharge tubes and means integral therewith for measuring gas pressure; Discharge tubes for evacuation by diffusion of ions
12Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
CPC
H01J 41/12
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
41Discharge tubes for measuring pressure of introduced gas ; or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
12Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
Applicants
  • EDWARDS VACUUM LLC [US]/[US]
Inventors
  • PRIVET, Evan
  • THIERLEY, Marcus Hans Robert
Priority Data
1912826.306.09.2019GB
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) REDUCING PLASMA FORMATION IN AN ION PUMP
(FR) RÉDUCTION DE LA FORMATION DE PLASMA DANS UNE POMPE IONIQUE
Abstract
(EN)
An ion pump controller configured to alternate between increasing and decreasing a potential difference between an anode and a cathode of an ion pump multiple times during the starting of pumping.
(FR)
Un dispositif de commande de pompe ionique est configuré pour alterner entre l'augmentation et la diminution d'une différence de potentiel entre une anode et une cathode d'une pompe ionique plusieurs fois pendant le démarrage du pompage.
Latest bibliographic data on file with the International Bureau