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1. WO2021044121 - WAVEGUIDE AND METHOD FOR FABRICATING A WAVEGUIDE MASTER GRATING TOOL

Publication Number WO/2021/044121
Publication Date 11.03.2021
International Application No. PCT/GB2020/052003
International Filing Date 20.08.2020
IPC
F21V 8/00 2006.01
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
21LIGHTING
VFUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
8Use of light guides, e.g. fibre optic devices, in lighting devices or systems
B29D 11/00 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
DPRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
11Producing optical elements, e.g. lenses or prisms
G02B 5/18 2006.01
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
5Optical elements other than lenses
18Diffracting gratings
G02B 27/01 2006.01
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
27Optical systems or apparatus not provided for by any of the groups G02B1/-G02B26/119
01Head-up displays
G03F 7/00 2006.01
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
CPC
B29D 11/00
BPERFORMING OPERATIONS; TRANSPORTING
29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
DPRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
11Producing optical elements, e.g. lenses or prisms
B29D 11/0048
BPERFORMING OPERATIONS; TRANSPORTING
29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
DPRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
11Producing optical elements, e.g. lenses or prisms
00009Production of simple or compound lenses
0048Moulds for lenses
G02B 27/0081
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
27Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
0081with means for altering, e.g. enlarging, the entrance or exit pupil
G02B 27/01
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
27Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
01Head-up displays
G02B 27/4272
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
27Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
42Diffraction optics ; , i.e. systems including a diffractive element being designed for providing a diffractive effect
4272having plural diffractive elements positioned sequentially along the optical path
G02B 5/1857
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
5Optical elements other than lenses
18Diffraction gratings
1847Manufacturing methods
1857using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
Applicants
  • BAE SYSTEMS PLC [GB]/[GB]
Inventors
  • MASON, Stephen
Agents
  • BAE SYSTEMS PLC, GROUP IP DEPT
Priority Data
1912820.606.09.2019GB
19275099.017.10.2019EP
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) WAVEGUIDE AND METHOD FOR FABRICATING A WAVEGUIDE MASTER GRATING TOOL
(FR) GUIDE D'ONDES ET PROCÉDÉ DE FABRICATION D'UN OUTIL DE RÉSEAU MAÎTRE DE GUIDE D'ONDES
Abstract
(EN)
There is provided a method for fabricating a waveguide master grating imprint tool. The method comprises: coating a substrate with at least one photoresist layer; selectively exposing a first diffraction grating master profile onto a first area of the at least one photoresist layer; selectively exposing a second diffraction grating master profile onto a second area of the at least one photoresist layer; and processing the substrate to form the first diffraction grating master profile and the second diffraction grating master profile. Each of the first diffraction grating profile and the second diffraction grating profile comprises an edge between the substrate and the respective grating profile that is substantially perpendicular to the substrate surface and each of the edges is substantially the same height as a maximum depth of the first diffraction grating master profile and the second diffraction grating master profile
(FR)
La présente invention concerne un procédé de fabrication d'un outil d'empreinte de réseau maître de guide d'ondes. Le procédé comprend : le revêtement d'un substrat avec au moins une couche de résine photosensible ; l'exposition sélective d'un premier profil maître de réseau de diffraction sur une première zone de l'au moins une couche de résine photosensible ; l'exposition sélective d'un second profil maître de réseau de diffraction sur une seconde zone de l'au moins une couche de résine photosensible ; et le traitement du substrat pour former le premier profil maître de réseau de diffraction et le second profil maître de réseau de diffraction. Chacun du premier profil de réseau de diffraction et du second profil de réseau de diffraction comprend un bord entre le substrat et le profil de réseau respectif qui est sensiblement perpendiculaire à la surface de substrat et chacun des bords présente sensiblement la même hauteur qu'une profondeur maximale du premier profil maître de réseau de diffraction et du second profil maître de réseau de diffraction.
Also published as
Latest bibliographic data on file with the International Bureau