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1. WO2021043462 - SPECTROMETER PACKAGE HAVING A MEMS FABRY-PÉROT INTERFEROMETER

Publication Number WO/2021/043462
Publication Date 11.03.2021
International Application No. PCT/EP2020/069000
International Filing Date 06.07.2020
IPC
G01J 3/02 2006.01
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
02Details
G01J 3/26 2006.01
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
12Generating the spectrum; Monochromators
26using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filter
CPC
G01J 3/0208
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
02Details
0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
0208using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
G01J 3/021
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
02Details
0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
021using plane or convex mirrors, parallel phase plates, or particular reflectors
G01J 3/0286
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
02Details
0286Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum
G01J 3/0291
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
02Details
0291Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
G01J 3/26
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
12Generating the spectrum; Monochromators
26using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
Applicants
  • ROBERT BOSCH GMBH [DE]/[DE]
Inventors
  • SCHELLING, Christoph
  • KNIES, Sonja
  • SCHMID, Marc
Priority Data
10 2019 213 286.303.09.2019DE
Publication Language German (DE)
Filing Language German (DE)
Designated States
Title
(DE) SPEKTROMETER-PACKAGE MIT MEMS FABRY-PÉROT-INTERFEROMETER
(EN) SPECTROMETER PACKAGE HAVING A MEMS FABRY-PÉROT INTERFEROMETER
(FR) BOÎTIER DE SPECTROMÈTRE AYANT UN INTERFÉROMÈTRE DE FABRY-PÉROT À MEMS
Abstract
(DE)
Die vorliegende Erfindung betrifft ein Spektrometer-Package mit einem Fabry-Pérot-Interferometer, das direkt an einem ersten Verdrahtungssubstrat des Spektrometer-Packages angeordnet ist, wobei ein Photodetektor des Spektrometer-Packages innerhalb einer Kaverne des ersten Verdrahtungssubstrats gehaltert ist.
(EN)
The present invention relates to a spectrometer package having a Fabry-Pérot interferometer, which is arranged directly on a first wiring substrate of the spectrometer package, wherein a photodetector of the spectrometer package is retained within a cavity in the first wiring substrate.
(FR)
La présente invention concerne un boîtier de spectromètre ayant un interféromètre de Fabry-Pérot, qui est disposé directement sur un premier substrat de câblage du boîtier de spectromètre, un photodétecteur du boîtier de spectromètre étant retenu à l'intérieur d'une cavité dans le premier substrat de câblage.
Also published as
Latest bibliographic data on file with the International Bureau