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1. WO2021043457 - INTERFEROMETER DEVICE AND METHOD FOR PRODUCING AN INTERFEROMETER DEVICE

Publication Number WO/2021/043457
Publication Date 11.03.2021
International Application No. PCT/EP2020/068537
International Filing Date 01.07.2020
IPC
G01J 3/02 2006.01
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
02Details
G01J 3/26 2006.01
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
12Generating the spectrum; Monochromators
26using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filter
CPC
G01J 3/021
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
02Details
0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
021using plane or convex mirrors, parallel phase plates, or particular reflectors
G01J 3/0286
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
02Details
0286Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum
G01J 3/0291
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
02Details
0291Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
G01J 3/26
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
12Generating the spectrum; Monochromators
26using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
Applicants
  • ROBERT BOSCH GMBH [DE]/[DE]
Inventors
  • MINGIRULLI, Nicola
  • SCHELLING, Christoph
Priority Data
10 2019 213 270.703.09.2019DE
Publication Language German (DE)
Filing Language German (DE)
Designated States
Title
(DE) INTERFEROMETEREINRICHTUNG UND VERFAHREN ZUM HERSTELLEN EINER INTERFEROMETEREINRICHTUNG
(EN) INTERFEROMETER DEVICE AND METHOD FOR PRODUCING AN INTERFEROMETER DEVICE
(FR) DISPOSITIF D'INTERFÉROMÈTRE ET PROCÉDÉ DE PRODUCTION D'UN DISPOSITIF D'INTERFÉROMÈTRE
Abstract
(DE)
Die vorliegende Erfindung schafft eine Interferometereinrichtung (10) umfassend ein Basissubstrat (2), welches zumindest einen elektrischen Leiteranschluss (2) umfasst; eine Interferometereinheit (1), welche auf dem Basissubstrat (2) angeordnet ist und eine erste Kavität (K1) über dem Basissubstrat (2) bildet; eine Detektoreinrichtung (3), welche auf dem Basissubstrat (2) angeordnet ist und in der ersten Kavität (K1) zwischen dem Basissubstrat (2) und der Interferometereinheit (1) angeordnet ist; eine Deckelstruktur (4), welche auf dem Basissubstrat (2) angeordnet ist und eine zweite Kavität (K2) über der Interferometereinheit (1) bildet, wobei die Deckelstruktur (4) eine Öffnung (5) über der Interferometereinheit (1) umfasst; und zumindest eine Filtereinrichtung (6), welche an der Deckelstruktur (4) angeordnet ist und die Öffnung (5) überspannt.
(EN)
The invention relates to an interferometer device (10) comprising a base substrate (2) which comprises at least one electric conductor connection (2); an interferometer unit (1) which is arranged on the base substrate (2) and forms a first cavity (K1) over the base substrate (2); a detector device (3) which is arranged on the base substrate (2) and in the first cavity (K1) between the base substrate (2) and the interferometer unit (1); a cover structure (4) which is arranged on the base substrate (2) and forms a second cavity (K2) over the interferometer unit (1), wherein the cover structure (4) comprises an opening (5) over the interferometer unit (1); and at least one filter device (6) which is arranged on the cover structure (4) and covers the opening (5).
(FR)
L'invention concerne un dispositif d'interféromètre (10) comprenant un substrat de base (2) qui comprend au moins une connexion de conducteur électrique (2) ; une unité d'interféromètre (1) qui est disposée sur le substrat de base (2) et forme une première cavité (K1) sur le substrat de base (2) ; un dispositif de détection (3) qui est disposé sur le substrat de base (2) et dans la première cavité (K1) entre le substrat de base (2) et l'unité d'interféromètre (1) ; une structure de recouvrement (4) qui est disposée sur le substrat de base (2) et forme une seconde cavité (K2) au-dessus de l'unité d'interféromètre (1), la structure de recouvrement (4) comprenant une ouverture (5) au-dessus de l'unité d'interféromètre (1) ; et au moins un dispositif de filtration (6) qui est disposé sur la structure de recouvrement (4) et recouvre l'ouverture (5).
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