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1. WO2021043411 - MAGNETIC GUIDE FOR GUIDING A CARRIER, TRANSPORT SYSTEM FOR TRANSPORTING A CARRIER, AND METHOD OF GUIDING A CARRIER

Publication Number WO/2021/043411
Publication Date 11.03.2021
International Application No. PCT/EP2019/073758
International Filing Date 05.09.2019
IPC
B65G 21/22 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
21Supporting or protective framework or housings for endless load-carriers or traction elements of belt or chain conveyors
20Means incorporated in, or attached to, framework or housings for guiding load-carriers, traction elements or loads supported on moving surfaces
22Rails or the like engaging sliding elements or rollers attached to load-carriers or traction elements
B65G 54/02 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
54Non-mechanical conveyors not otherwise provided for
02electrostatic, electric, or magnetic
H01L 21/677 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677for conveying, e.g. between different work stations
CPC
B65G 21/22
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
21Supporting or protective framework or housings for endless load-carriers or traction elements of belt or chain conveyors
20Means incorporated in, or attached to, framework or housings for guiding load-carriers, traction elements or loads supported on moving surfaces
22Rails or the like engaging sliding elements or rollers attached to load-carriers or traction elements
B65G 54/02
BPERFORMING OPERATIONS; TRANSPORTING
65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
54Non-mechanical conveyors not otherwise provided for
02electrostatic, electric, or magnetic
C23C 14/568
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
568Transferring the substrates through a series of coating stations
C23C 16/54
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
16Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
44characterised by the method of coating
54Apparatus specially adapted for continuous coating
H01L 21/67709
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
67703between different workstations
67709using magnetic elements
H01L 21/67739
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
67739into and out of processing chamber
Applicants
  • APPLIED MATERIALS, INC. [US]/[US]
  • HEIMEL, Oliver [DE]/[DE] (US)
  • LINDENBERG, Ralph [DE]/[DE] (US)
Inventors
  • HEIMEL, Oliver
  • LINDENBERG, Ralph
Agents
  • ZIMMERMANN & PARTNER PATENTANWÄLTE MBB
Priority Data
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) MAGNETIC GUIDE FOR GUIDING A CARRIER, TRANSPORT SYSTEM FOR TRANSPORTING A CARRIER, AND METHOD OF GUIDING A CARRIER
(FR) GUIDE MAGNÉTIQUE PERMETTANT DE GUIDER UN SUPPORT, SYSTÈME DE TRANSPORT PERMETTANT DE TRANSPORTER UN SUPPORT ET PROCÉDÉ DE GUIDAGE D'UN SUPPORT
Abstract
(EN)
One aspect of the present disclosure provides a magnetic guide for guiding a carrier. The magnetic guide includes a housing having a first portion and a second portion arranged opposite from the first portion, at least one first guiding magnet arranged on a surface of the first portion, and at least one second guiding magnet arranged on a surface of the second portion, wherein the at least one first guiding magnet extends past a first end of the first portion, the first end comprising a magnetic material, and the at least one second guiding magnet extends past a second end of the second portion, the second end comprising a magnetic material. Further aspects of the present disclosure provide a transport system for transporting a carrier having said magnetic guide, a substrate processing system and a method for guiding a carrier with said magnetic guide.
(FR)
Un aspect de la présente invention concerne un guide magnétique permettant de guider un support. Le guide magnétique comprend un boîtier présentant une première partie et une seconde partie agencée à l'opposé de la première partie, au moins un premier aimant de guidage agencé sur une surface de la première partie et au moins un second aimant de guidage agencé sur une surface de la seconde partie, ledit au moins un premier aimant de guidage s'étendant au-delà d'une première extrémité de la première partie, la première extrémité comprenant un matériau magnétique, et l'au moins un second aimant de guidage s'étendant au-delà d'une seconde extrémité de la seconde partie, la seconde extrémité comprenant un matériau magnétique. D'autres aspects de la présente invention concernent un système de transport permettant de transporter un support présentant ledit guide magnétique, un système de traitement de substrat et un procédé de guidage d'un support avec ledit guide magnétique.
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