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1. WO2021036758 - BULK ACOUSTIC WAVE RESONATOR

Publication Number WO/2021/036758
Publication Date 04.03.2021
International Application No. PCT/CN2020/107912
International Filing Date 07.08.2020
IPC
H03H 3/02 2006.01
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
3Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
007for the manufacture of electromechanical resonators or networks
02for the manufacture of piezo-electric or electrostrictive resonators or networks
H03H 9/02 2006.01
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
02Details
H03H 9/15 2006.01
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
15Constructional features of resonators consisting of piezo-electric or electrostrictive material
CPC
H03H 3/02
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
3Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
007for the manufacture of electromechanical resonators or networks
02for the manufacture of piezo-electric or electrostrictive resonators or networks
H03H 9/02015
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
02Details
02007of bulk acoustic wave devices
02015Characteristics of piezoelectric layers, e.g. cutting angles
H03H 9/02086
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
02Details
02007of bulk acoustic wave devices
02086Means for compensation or elimination of undesirable effects
H03H 9/0211
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
02Details
02007of bulk acoustic wave devices
02086Means for compensation or elimination of undesirable effects
0211of reflections
H03H 9/15
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
15Constructional features of resonators consisting of piezo-electric or electrostrictive material
Applicants
  • 迈感微电子(上海)有限公司 MG MICROELECTRONICS CO., LTD [CN]/[CN]
Inventors
  • 缪建民 MIU, Jianmin
  • 张瑞珍 ZHANG, Ruizhen
Agents
  • 上海申新律师事务所 SHANGHAI SHENXIN LAW FIRM
Priority Data
201910818904.830.08.2019CN
Publication Language Chinese (ZH)
Filing Language Chinese (ZH)
Designated States
Title
(EN) BULK ACOUSTIC WAVE RESONATOR
(FR) RÉSONATEUR À ONDES ACOUSTIQUES DE VOLUME
(ZH) 一种体声波谐振器
Abstract
(EN)
Provided is a bulk acoustic wave resonator, comprising: a first electrode (10), a piezoelectric layer (20), and a second electrode (30), said piezoelectric layer (20) being arranged between said first electrode (10) and said second electrode (30); the piezoelectric layer (20) is provided with at least one slit (21); along the direction in which the first electrode (10) points toward the second electrode (30), said slit (21) at least runs through the piezoelectric layer (20). The slit (21) reduces the generation of transverse standing waves, thereby reducing noise and improving the performance of the bulk acoustic wave resonator.
(FR)
L'invention concerne un résonateur à ondes acoustiques de volume, comprenant : une première électrode (10), une couche piézoélectrique (20), et une seconde électrode (30), ladite couche piézoélectrique (20) étant disposée entre ladite première électrode (10) et ladite seconde électrode (30) ; la couche piézoélectrique (20) est pourvue d'au moins une fente (21) ; dans la direction dans laquelle la première électrode (10) pointe vers la seconde électrode (30), ladite fente (21) s'étend au moins à travers la couche piézoélectrique (20). La fente (21) réduit la génération d'ondes stationnaires transversales, ce qui permet de réduire le bruit et d'améliorer les performances du résonateur à ondes acoustiques de volume.
(ZH)
一种体声波谐振器,其包括:第一电极(10)、压电层(20)以及第二电极(30),所述压电层(20)设置于所述第一电极(10)和所述第二电极(30)之间;所述压电层(20)设置有至少一个开缝(21),沿所述第一电极(10)指向所述第二电极(30)的方向,所述开缝(21)至少贯穿所述压电层(20)。该开缝(21)减少了横向驻波的产生,从而降低了噪声,提升了体声波谐振器的性能。
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Latest bibliographic data on file with the International Bureau