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1. WO2021022303 - RADIO FREQUENCY POWER GENERATOR HAVING MULTIPLE OUTPUT PORTS

Publication Number WO/2021/022303
Publication Date 04.02.2021
International Application No. PCT/US2020/070333
International Filing Date 30.07.2020
IPC
H01J 37/32 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes
H03G 3/30 2006.01
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
GCONTROL OF AMPLIFICATION
3Gain control in amplifiers or frequency changers
20Automatic control
30in amplifiers having semiconductor devices
H01L 21/3065 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02Manufacture or treatment of semiconductor devices or of parts thereof
04the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer
18the devices having semiconductor bodies comprising elements of group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20-H01L21/26142
302to change the physical characteristics of their surfaces, or to change their shape, e.g. etching, polishing, cutting
306Chemical or electrical treatment, e.g. electrolytic etching
3065Plasma etching; Reactive-ion etching
Applicants
  • LAM RESEARCH CORPORATION [US]/[US]
Inventors
  • KAPOOR, Sunil
Agents
  • KELLOGG, David C.
  • WEAVER, Jeffrey K.
  • AUSTIN, James E.
  • VILLENEUVE, Joseph M.
  • SAMPSON, Roger S.
  • GRIFFITH, John F.
  • BERGIN, Denise S.
  • SCHOLZ, Christian D.
Priority Data
62/880,82231.07.2019US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) RADIO FREQUENCY POWER GENERATOR HAVING MULTIPLE OUTPUT PORTS
(FR) GÉNÉRATEUR D'ÉNERGIE RADIOFRÉQUENCE AYANT DE MULTIPLES PORTS DE SORTIE
Abstract
(EN)
A radio frequency (RF) power generator adapted for coupling to a multi- station integrated circuit fabrication chamber may include an oscillator to provide a periodic signal and one or more preamplifiers each having an input port to receive a signal from the oscillator and having an output port to provide an amplified signal. The RF generator may additionally include one or more constant-gain amplifiers, each having an input port to receive a signal from the one or more preamplifiers, and an output port configured for coupling an amplified signal to an electrode for generating a plasma in an assigned station of the multi-station integrated circuit fabrication chamber.
(FR)
L'invention concerne un générateur d'énergie radiofréquence (RF) conçu pour être couplé à une chambre de fabrication de circuit intégré multi-station pouvant comprendre un oscillateur permettant de fournir un signal périodique et un ou plusieurs préamplificateurs ayant chacun un port d'entrée permettant de recevoir un signal provenant de l'oscillateur et ayant un port de sortie permettant de fournir un signal amplifié. Le générateur RF peut en outre comprendre un ou plusieurs amplificateurs à gain constant, ayant chacun un port d'entrée permettant de recevoir un signal provenant du ou des préamplificateurs, et un port de sortie configuré pour coupler un signal amplifié à une électrode afin de générer un plasma dans une station attribuée de la chambre de fabrication de circuit intégré multi-station.
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