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1. WO2021021504 - ISOLATION VALVE

Publication Number WO/2021/021504
Publication Date 04.02.2021
International Application No. PCT/US2020/042968
International Filing Date 22.07.2020
IPC
H01L 21/67 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
F16K 49/00 2006.01
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16ENGINEERING ELEMENTS OR UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
49Means in or on valves for heating or cooling
CPC
F16K 1/2007
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
1Lift valves ; or globe valves; , i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
16with pivoted closure-members
18with pivoted discs or flaps
20with axis of rotation arranged externally of valve member
2007specially adapted operating means therefor
F16K 1/2042
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
1Lift valves ; or globe valves; , i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
16with pivoted closure-members
18with pivoted discs or flaps
20with axis of rotation arranged externally of valve member
2042Special features or arrangements of the sealing
F16K 49/005
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
49Means in or on valves for heating or cooling
005Circulation means for a separate heat transfer fluid
H01L 21/67017
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
67005Apparatus not specifically provided for elsewhere
67011Apparatus for manufacture or treatment
67017Apparatus for fluid treatment
Applicants
  • APPLIED MATERIALS, INC. [US]/[US]
Inventors
  • RIORDON, Benjamin
  • SUBRAMANI, Anatha K.
  • CARLSON, Charles T.
Agents
  • MCCORMICK, Daniel
  • KILPATRICK TOWNSEND & STOCKTON LLP
Priority Data
62/881,18131.07.2019US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) ISOLATION VALVE
(FR) VANNE D'ISOLATION
Abstract
(EN)
Described are isolation valves, and chamber systems incorporating and methods of using the isolation valves. In some embodiments, an isolation valve may include a valve body and a flapper assembly. The valve body may define a first fluid volume, a second fluid volume, and a seating surface. The flapper assembly may include a flapper disposed inside the valve body having a flapper surface complimentary to the seating surface. The flapper may be pivotable within the valve body to a first position such that the flapper surface may be away from the seating surface to allow fluid flow between the first fluid volume and the second fluid volume. The flapper may be pivotable within the valve body to a second position such that the flapper surface may be proximate the seating surface to form a non-contact seal to restrict fluid flow between the first fluid volume and the second fluid volume.
(FR)
L'invention concerne des vannes d'isolation, des systèmes de chambres comprenant les vannes d'isolation et des procédés d'utilisation des vannes d'isolation. Dans certains modes de réalisation, une vanne d'isolation peut comprendre un corps de vanne et un ensemble clapet. Le corps de vanne peut délimiter un premier volume de fluide, un second volume de fluide et une surface d'assise. L'ensemble clapet peut comprendre un clapet disposé à l'intérieur du corps de vanne ayant une surface de clapet complémentaire de la surface d'assise. Le clapet peut pivoter à l'intérieur du corps de vanne vers une première position de telle sorte que la surface de clapet peut être située à distance de la surface d'assise pour permettre un écoulement de fluide entre le premier volume de fluide et le second volume de fluide. Le clapet peut pivoter à l'intérieur du corps de vanne vers une seconde position de telle sorte que la surface de clapet peut être située à proximité de la surface d'assise pour former un joint sans contact afin de restreindre l'écoulement de fluide entre le premier volume de fluide et le second volume de fluide.
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