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1. WO2021019346 - DEVICE FOR PICKING UP AND HANDLING A PLANAR-SHAPED OBJECT

Publication Number WO/2021/019346
Publication Date 04.02.2021
International Application No. PCT/IB2020/056639
International Filing Date 15.07.2020
IPC
G01R 31/28 2006.01
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
31Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
28Testing of electronic circuits, e.g. by signal tracer
H01L 21/683 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
683for supporting or gripping
CPC
G01R 31/2865
GPHYSICS
01MEASURING; TESTING
RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
31Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
28Testing of electronic circuits, e.g. by signal tracer
2851Testing of integrated circuits [IC]
2855Environmental, reliability or burn-in testing
286External aspects, e.g. related to chambers, contacting devices or handlers
2865Holding devices, e.g. chucks; Handlers or transport devices
H01L 21/6838
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
683for supporting or gripping
6838with gripping and holding devices using a vacuum; Bernoulli devices
Applicants
  • AMX - AUTOMATRIX S.R.L. [IT]/[IT]
Inventors
  • SCHIVALOCCHI, Nicola
Agents
  • CHIMINI, Francesco
  • PULIERI, Gianluca Antonio
  • GUALENI, Nadia
  • DE LORENZO, Danilo
  • GAMBA, Alessandro
  • MITOLA, Marco
  • ZANETTIN, Gianluigi
  • BUSANA, Omar
  • CRIPPA, Paolo Ernesto
  • CARANGELO, Pierluigi
Priority Data
10201900001347931.07.2019IT
Publication Language English (EN)
Filing Language Italian (IT)
Designated States
Title
(EN) DEVICE FOR PICKING UP AND HANDLING A PLANAR-SHAPED OBJECT
(FR) DISPOSITIF DE SAISIE ET DE MANIPULATION D'UN OBJET DE FORME PLANE
Abstract
(EN)
A device for picking up and handling a planar-shaped object (2), for example a substrate bearing electronic components, comprises a device body (10) in which there are obtained a lowered region (14) delimited by a support edge of the object, at least one fluid inflow channel (20) communicating with a lowered region (14), at least one suction channel (30) communicating with the lowered region (14) and suitable to be connected to a suction device (200).
(FR)
L'invention concerne un dispositif permettant de saisir et de manipuler un objet de forme plane (2), par exemple un substrat comportant des composants électroniques, qui comprend un corps de dispositif (10) dans lequel sont obtenues une région abaissée (14) délimitée par un bord de support de l'objet, au moins un canal d'arrivée de fluide (20) communiquant avec la zone abaissée (14), et au moins un canal d'aspiration (30) communiquant avec la zone abaissée (14) et apte à être relié à un dispositif d'aspiration (200).
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