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1. WO2021001383 - PULSED GENERATOR OF ELECTRICALLY CHARGED PARTICLES AND METHOD OF USE OF A PULSED GENERATOR OF ELECTRICALLY CHARGED PARTICLES

Publication Number WO/2021/001383
Publication Date 07.01.2021
International Application No. PCT/EP2020/068427
International Filing Date 30.06.2020
IPC
H01J 3/02 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
3Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
02Electron guns
H01J 37/073 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02Details
04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
06Electron sources; Electron guns
073Electron guns using field emission, photo emission, or secondary emission electron sources
H01J 37/26 2006.1
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
26Electron or ion microscopes; Electron- or ion-diffraction tubes
CPC
H01J 2203/0292
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
2203Electron or ion optical arrangements common to discharge tubes or lamps
02Electron guns
0204using cold cathodes, e.g. field emission cathodes
0292Potentials applied to the electrodes
H01J 2203/04
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
2203Electron or ion optical arrangements common to discharge tubes or lamps
04Ion guns
H01J 2237/062
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
2237Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
06Sources
061Construction
062Reducing size of gun
H01J 2237/06333
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
2237Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
06Sources
063Electron sources
06325Cold-cathode sources
06333Photo emission
H01J 2237/08
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
2237Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
06Sources
08Ion sources
H01J 2237/2605
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
2237Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
26Electron or ion microscopes
2602Details
2605operating at elevated pressures, e.g. atmosphere
Applicants
  • COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES [FR]/[FR]
Inventors
  • GELEOC, Marie
  • RENAULT, Jean-Philippe
  • OKSENHENDLER, Thomas
Agents
  • LEBKIRI, Alexandre
Priority Data
FR190732402.07.2019FR
Publication Language French (fr)
Filing Language French (FR)
Designated States
Title
(EN) PULSED GENERATOR OF ELECTRICALLY CHARGED PARTICLES AND METHOD OF USE OF A PULSED GENERATOR OF ELECTRICALLY CHARGED PARTICLES
(FR) GENERATEUR PULSE DE PARTICULES CHARGEES ELECTRIQUEMENT ET PROCEDE D'UTILISATION D'UN GENERATEUR PULSE DE PARTICULES CHARGEES ELECTRIQUEMENT
Abstract
(EN) The subject of the invention is a pulsed generator of electrically charged particles comprising: a vacuum chamber (V); said generator being characterized in that: the vacuum chamber (V) is configured to maintain an internal operating pressure of between 10-6 mbar and atmospheric pressure; the vacuum chamber (V) is configured to accommodate a photocathode (PH) and an anode (AN), the photocathode (PH) and the anode (AN) being separated by an adjustable distance (L) smaller than or equal to 30 mm; the vacuum chamber (V) comprises a window (F) allowing a pulsed light to first reach a rear face of the photocathode; the anode is arranged downstream of the photocathode and has an orifice suitable for the passage of the electrically charged particles; the generator of electrically charged particles comprises means for applying a difference in potential between the photocathode and the anode, said voltage being configured to accelerate the charged particles.
(FR) L'invention a pour objet un générateur pulsé de particules chargées électriquement comprenant : une enceinte à vide (V); ledit générateur étant caractérisé en ce que : l'enceinte à vide (V) est configurée pour maintenir une pression interne de fonctionnement comprise entre 10-6 mbar et la pression atmosphérique; l'enceinte à vide (V) est configurée pour accueillir une photocathode (PH) et une anode (AN), la photocathode (PH) et l'anode (AN) étant séparées par une distance (L) ajustable inférieure ou égale à 30 mm; l'enceinte à vide (V) comporte une fenêtre (F) permettant à une lumière impulsionnelle d'atteindre en premier une face arrière de la photocathode; l'anode est disposée en aval de la photocathode et présente un orifice adapté pour le passage des particules chargées électriquement; le générateur de particules chargées électriquement comprend des moyens pour appliquer une différence de potentiel entre la photocathode et l'anode, ladite tension électrique étant configurée pour accélérer les particules chargées.
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