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1. WO2020246881 - APPARATUS AND METHOD FOR DETECTING ONE OR MORE SCANNING CHARGED PARTICLE BEAMS

Publication Number WO/2020/246881
Publication Date 10.12.2020
International Application No. PCT/NL2020/050358
International Filing Date 03.06.2020
IPC
H01J 37/28 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
26Electron or ion microscopes; Electron- or ion-diffraction tubes
28with scanning beams
H01J 37/22 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02Details
22Optical or photographic arrangements associated with the tube
CPC
H01J 2237/2443
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
2237Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
244Detection characterized by the detecting means
2443Scintillation detectors
H01J 2237/24455
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
2237Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
244Detection characterized by the detecting means
24455Transmitted particle detectors
H01J 2237/2802
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
2237Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
26Electron or ion microscopes
28Scanning microscopes
2802Transmission microscopes
H01J 2237/2808
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
2237Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
26Electron or ion microscopes
28Scanning microscopes
2803characterised by the imaging method
2808Cathodoluminescence
H01J 37/226
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02Details
22Optical or photographic arrangements associated with the tube
226Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
H01J 37/28
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
26Electron or ion microscopes; Electron or ion diffraction tubes
28with scanning beams
Applicants
  • DELMIC IP B.V. [NL]/[NL]
Inventors
  • VOORTMAN, Lennart
  • EFFTING, Andries Pieter Johan
Agents
  • PETERS, Sebastian Martinus
Priority Data
202324903.06.2019NL
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) APPARATUS AND METHOD FOR DETECTING ONE OR MORE SCANNING CHARGED PARTICLE BEAMS
(FR) APPAREIL ET PROCÉDÉ DE DÉTECTION D'UN OU PLUSIEURS FAISCEAUX DE PARTICULES CHARGÉES PAR BALAYAGE
Abstract
(EN)
The invention relates to an apparatus for inspecting a sample. The apparatus comprises: a sample holder (10) for holding the sample (5), a charged particle column (7, 8) for generating and focusing one or more charged particle beams at one or more charged particle beam spots onto the sample, a scanning deflector for moving said charged particle beam spot(s) over the sample, a photon detector (4) configured for detecting photons created when said one or more charged particle beams impinge on the sample or when said one or more charged particle beams impinge onto a layer of luminescent material (6) after transmission through the sample, an optical assembly (2) for projecting or imaging at least part of said photons from said charged particle beam spot(s) along an optical beam path onto said photon detector, and a shifting unit (3) for shifting the optical beam path and/or the photon detector with respect to each other.
(FR)
L'invention porte sur un appareil pour inspecter un échantillon. L'appareil comprend : un porte-échantillon (10) destiné à contenir l'échantillon (5), une colonne de particules chargées (7, 8) pour générer et focaliser un ou plusieurs faisceaux de particules chargées sur un ou plusieurs points de faisceau de particules chargées sur l'échantillon, un déflecteur de balayage pour déplacer ledit point de faisceau de particules chargées (s) sur l'échantillon, un détecteur de photons (4) configuré pour détecter des photons créés lorsque ledit ou lesdits faisceaux de particules chargées se heurtent à l'échantillon ou lorsque ledit ou lesdits faisceaux de particules chargées se heurtent à une couche de matériau luminescent (6) après transmission à travers l'échantillon, un ensemble optique (2) pour projeter ou imager au moins une partie desdits photons à partir dudit point de faisceau de particules chargées (s) le long d'un trajet de faisceau optique sur ledit détecteur de photons, et une unité de décalage (3) pour décaler le trajet de faisceau optique et/ou le détecteur de photons l'un par rapport à l'autre.
Also published as
Latest bibliographic data on file with the International Bureau